Sensirion - Smart Sensor Solutions

Name	Description	Series	Category
SFC6000	MFC with best price-performance ratio, customizable version	SFC6000 Mass flow controllers	Mass flow controllers
SFC6000D-50slm	Best price-performance ratio, distribution version, 50 slm	SFC6000 Mass flow controllers	Mass flow controllers
SFC6000D-20slm	Best price-performance ratio, distribution version, 20 slm	SFC6000 Mass flow controllers	Mass flow controllers
SFC6000D-5slm	Best price-performance ratio, distribution version, 5 slm	SFC6000 Mass flow controllers	Mass flow controllers

15.03.2023 Press release

Name	Series	Date	Type	Size
Documentation I2C Interface SFC6000D and SFM6000D 07.2023 PDF 820.0 KB	Gas flow sensors / Mass flow controllers / SFC6000 / SFM6000	07.2023	PDF	820.0 KB
Datasheet SFC6000D/SFM6000D 05.2023 PDF 1.4 MB	Gas flow sensors / Mass flow controllers / EK-F5x / SFC6000 / SFM6000	05.2023	PDF	1.4 MB