Flow Sensors
Sensirion is the leading manufacturer of flow sensor solutions for the measurement of gas and liquid flows. Flow sensors are being used all over the world, including in the medical technology, industrial processes and in HVAC and smart energy applications. Sensirion’s success is based on the innovative CMOSens® technology, which combines the sensor and analysis electronics in a single semiconductor chip.
Product Highlight
Mass Flow Meter SFM4300

The small, compact sensor is calibrated for air, O2 and N2O gases and – in contrast to its predecessor, the mass flow meter SFM4100 – it can also be used to monitor gas mixing. With a zero-point accuracy of 0.005 slm for a total range of up to 20 slm, the SFM4300 enables precise adjustment of the concentration in a wide selection of mixtures. The sensor unit has an I²C interface and produces a fully calibrated and temperature-compensated output signal. The mass flow sensor can be used for both medical and industrial gas mixing, fuel cells and for other OEM applications.
Flow Sensors
Sensirion's mass flow meters ensure fast, accurate and economical measurements of gas flow over a wide dynamic range. At the heart of every mass flow sensor is a MEMS based calorimetric microsensor, which measures the gas flow using the thermal measurement principle. The sensor element is integrated with the complete signal conditioning electronics on one single chip. This unique integrated technological approach - provided by the unparalleled and innovative CMOSens® Technology - results in excellent performance at a very attractive cost. That is why leading manufacturers, including ones in the medical industry, rely on Sensirion's highly sensitive flow meters today.
Sensirion's mass flow controllers are characterized by fast and accurate control of gas flow over a wide dynamic range. Based on the innovative CMOSens® Technology, the heart of these mass flow controllers is a calorimetric microsensor (MEMS), which is integrated with the complete signal conditioning electronics on one single chip. While the flow is measured using the thermal measurement principle, efficient control is provided by an analog controlling circuit. This unique integrated technological approach results in excellent performance and reliability - at a very attractive cost.
Gas meter modules from Sensirion monitor gas consumption reliable and in real-time. The digital sensors are temperature compensated, pressure independent as well as long-term stable. The modules boast a compact design that enables easy integration in gas meters. With the Complete Design-In Solution, Sensirion provides its clients one-of-a-kind support for the development of a smart gas meter.
Sensirion's liquid flow meters establish new standards wherever monitoring of low liquid flow rates, liquid handling, and liquid dispensing is important. Our unique CMOSens® Technology allows measuring the liquid flow bi-directionally through the wall of the sensor’s flow channel from hundreds of milliliters per minute down to single-digit nanoliters per minute. Applications in fields like medical devices, diagnostics as well as process and automation technology benefit daily from our safe and reliable sensor solutions.
Differential pressure sensors from Sensirion measure reliably, fast and stable. The digital and analog sensors offer highest accuracy and resolution, especially at very low differential pressures. The small and cost-effective design makes them an ideal match for price-sensitive solutions, e.g. in medical and HVAC applications. Each differential pressure sensor is individually calibrated and temperature compensated.