Sensor Platform for Flow Measurement in Respiratory Devices
Sensirion's flow platform SFM3xxx includes sensors for inspiratory, expiratory and proximal flow measurement as well as gas mixing in ventilation and anesthesia applications. With the platform, Sensirion offers its customers the right sensor for all flow measurements and underscores its worldwide expertise in the field of medical ventilation. The SFM3xxx platform from Sensirion consists of multiple flow sensors with comprehensive capabilities for a diverse range of medical applications. All the sensors of the SFM3xxx platform share characteristics such as high precision and robustness. All are fully calibrated and temperature-compensated sensors and measure the flow rates of air and other non-corrosive gases bidirectionally and accurately. They also impress with very low pressure drop and fast signal processing times.

With this comprehensive range of features, the sensors of the SFM3xxx platform cover all gas flow measurement requirements in medical technology. The sensors can be used in a wide range of medical applications, such as artificial ventilation, anesthesia, drug delivery and metabolic measurements. The SFM3000, SFM3100 and SFM3200 mass flow meters are suitable for inspiratory flow measurements and gas mixing, while the autoclavable and single-use SFM3200-AW, SFM3300 and SFM3400 mass flow meters are the first choice for expiratory or proximal flow measurements.
The SFM3000 digital mass flow meter is ideal for high-volume applications in which cost efficiency is the priority. With the SFM3100, Sensirion offers a similar product that can be easily integrated into existing devices. A temperature sensor in the gas channel of the sensor enables highly precise temperature compensation and eliminates the need for an additional temperature sensor. The SFM3200 mass flow meter boasts a wide dynamic measurement range, high precision at low flow rates and low pressure drop in the flow body of the sensor.
With the SFM3200-AW, the SFM3300-AW and the SFM3400-AW, Sensirion also offers three autoclavable mass flow meters. Thanks to their robustness, the sensors can be treated in an autoclave, making them sterilizable and thus reusable. The SFM3200-AW offers outstanding performance at low flow rates and is used primarily in expiratory flow measurement applications, while the SFM3300 series (for adult ventilation) and the SFM3400 series (for pediatric and neonatal applications) were developed for proximal flow measurement. Both sensor variants are available in the reusable option "AW" and the single-use option "D". As both expiratory and proximal flow measurement have to work with humid respiratory air, a special, externally controllable heating element has been integrated. This helps prevent condensation on the sensor element.
Like all sensors from Sensirion, the outstanding performance of the SFM3xxx platform is based on the patented CMOSens® Technology. This enables integration of the sensor and evaluation circuit on a single CMOS silicon chip. The result is an ultra-precision system that offers long-term stability for sophisticated and cost-sensitive applications. The technology is also highly resistant to environmental effects, which is why CMOSens® based flow sensors are perfect for use as sterilizable sensors.

The use and spread of ventilators will continue to grow strongly in the future due to the increasing number of lung diseases. Modern ventilators place ever-growing demands on sensors in order to set the focus on the patients and their therapy. Sensirion's CMOSens® Technology has established a new generation of flow sensors that have proven their reliability millions of times in the field of CPAP devices. This technological advantage will enable manufacturers to realize the next quantum leaps in ventilation. Read the complete specialist article here.
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Sensirion, the innovation and market leader for flow and environmental sensors, offers the right flow sensor for every measurement in respiratory devices. With its SFM3xxx platform underscoring its worldwide expertise in the field of medical ventilation. It consists of inspiratory, expiratory and proximal flow sensors as well as sensors for gas mixing.
Proximal Flow Sensors in Respiratory Devices
Expiratory Flow Sensors in Respiratory Devices
Flow Sensors for Gas Mixing in Respiratory Devices
In addition to inspiratory, expiratory and proximal flow measurement, Sensirion offers sensor solutions for gas mixing applications. These sensors are mainly used in anesthesia machines and are usually integrated into the overall machine. If we want to guarantee the patient’s safety while taking accurate, reproducible readings, we need the flow sensors in the machine to be stable and reliable – throughout the machine’s service life. Therefore, the Sensirion SFM4000 series is the ideal solution. It is is devided in two sensors: SFM4100 and SFM4200. The SFM4100 sensor can operate at pressures of up to 6 bar, store multiple gas calibrations and even perform self-testing while in use. Where safety and reliability are concerned, the SFM4100 is the preferred choice. The SFM4200 sensor is its bigger brother. Highly resistant to pressure, it guarantees reliable measurements at surges of up to 8 bar. Its signal processing time is 0.5 ms, making it incredibly fast and accurate. Customers also benefit from an expanded measurement range of up to 160 liters per minute.
Sensors of the SFM3xxx Platform

SFM3100
The analog mass flow meter SFM3100 is highly accurate and fast. The SFM3100 has a compact design and can be easily integrated into existing devices. There is a temperature sensor in the gas channel of the flow meter. This enables highly precise temperature compensation and obviates the need to integrate a dedicated temperature sensor.

SFM3400
The SFM3400 flow sensor is a proximal flow sensor for neonatal and pediatric applications in respiratory devices such as ventilation or anesthesia. The sensor is available as both a single-use version (SFM3400-D) and a reusable version (SFM3400-AW). The reusable solution is autoclavable and washable.