Mass Flow Meters SFM3003 and SFM3013

The flow of air, oxygen and mixtures thereof at rates between -30 and 300 slm is measured with excellent accuracy, reliability and long-term stability, and no recalibration is needed. The SFM3003 outputs an easily integrable digital I²C interface. The signal is internally linearized and temperature compensated. Furthermore, the SFM3003 flow meter has a very low pressure drop, ultra-fast response time and optimal signal-to-noise ratio.

Several additional product versions exist for more options:

• An extended flow range between -150 and 300 slm can be chosen with the SFM3003-300-CE
• The SFM3013-300-CL offers an additional robustness to overpressure (up to 1 bar gauge pressure)
• The SFM3013-300-CLM is also calibrated for heliox gas

As part of the SFM3xxx platform, the SFM3003 is a versatile sensor solution for many different high-volume applications in which cost efficiency is the priority. The outstanding performance of the SFM3003 sensor is based on Sensirion’s patented CMOSens® Technology, which combines the sensor element, signal processing and digital calibration on a tiny microchip. The gas is measured by a thermal sensor element to provide an extended dynamic range and enhanced long-term stability compared to other flow-measuring technologies. Thanks to this proven CMOSens® Technology, the flow meter is perfectly suited for high-quality mass production and is the ideal choice for demanding and cost-sensitive OEM applications.

Test and evaluate the SFM30x3 mass flow meters with the SEK evaluation kit.

The new SFM30x3 mass flow meters for air and oxygen are in production. They will be available in Q3 2021 worldwide via distribution. The SFM3013-300-CLM for heliox gas will be available by the end of 2021.