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    Sensirion AG Switzerland
    • Home
    • Environmental Sensors
      • Humidity Sensors
        • Digital Humidity Sensor SHT4x (RH/T)
        • Digital Humidity Sensor SHT3x (RH/T)
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      • Formaldehyde Sensor SFA30

        Formaldehyde Sensing Made Easy

        The SFA30 is Sensirion’s new digital formaldehyde sensor designed for easy integration into air purifiers, demand-controlled ventilation systems, or indoor air quality monitors. Based on Sensirion’s electrochemical technology, the SFA30 offers excellent formaldehyde sensing performance with a uniquely low cross-sensitivity to other VOCs. The sensor module’s on-board SHT sensor provides accurate humidity and temperature readings and enables a fully temperature/humidity compensated and factory calibrated formaldehyde concentration output in ppb.

        More

    • Flow Sensors
      • Liquid Flow Meters
        • Lx – Compact Liquid Flow Meters
          • Liquid Flow Meter LG16
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      • Evaluation Kit SEK-Flow Sensing
      • Product Highlight

        Evaluation kit for the single-use liquid flow sensor LD20-2600B

        The LD20-2600B single-use liquid flow sensor for fast, precise and reliable measurements of the lowest flow rates in biomedical applications was successfully launched three years ago. The evaluation kit for this OEM liquid flow sensor can now also be purchased online via Sensirion's distribution network.

        Read more

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        Experts for Smart Sensor Solutions

        Sensirion's sensors are used in a wide range of markets and different applications. Our high-quality environmental and flow sensors and sensor solutions improve energy efficiency and sustainability. They increase our safety, support our health and raise the quality of life. 

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        Sensirion Worldwide

        Founded in 1998 Sensirion has become the leading manufacturer of flow and environmental sensors solutions. The company now employs people in various countries such as the USA, South Korea, Japan, China, Taiwan, and Germany. The headquarters in Switzerland is responsible for research, development, and production. 

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    • Mass Flow Meters for Gases

      High precise, ultra fast und long-term stable measurement of gases.

    • Home
    • Flow Sensors
    • Mass Flow Meters for Gases

    Mass Flow Meters for Gases

    With our long history of designing mass flow solutions for medical and industrial automation, Sensirion is your ideal partner to support you in the development of new products. Our mass flow meters ensure fast, accurate and economical measurements of gas flow over a wide dynamic range. They are extremly reliable and long-term stable and are free from zero-point drift.

    At the heart of every mass flow sensor is a MEMS based calorimetric microsensor, which measures the gas flow using the thermal measurement principle. The sensor element is integrated with the complete signal conditioning electronics on one single chip. This unique integrated technological approach - provided by the unparalleled and innovative CMOSens® Technology - results in excellent performance at a very attractive cost.

    Sensirion offers mass flow meters for diverse applications. Please find in the table below all our standard products. Furthermore, we also develop customized sensor solutions.

    Please click on the mass flow meter inside the table for detailed information.


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    Mass Flow Meter SFM3000

    Sensirion Mass Flow Meters SFM3000
    • Versatile digital flow meter
    • Fully bidirectional
    • Low pressure drop
    • Product Page
    • Datasheet
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    Mass Flow Meters SFM3003 and SFM3013

    • Versatile digital flow meter
    • Next generation flow meter (wider flow range and improved specifications)
    • For high-volume and cost-sensitive applications
    • Product Page
    • Datasheet
    • Contact

    Mass Flow Meter SFM3019

    Sensirion Mass Flow Meter SFM3019
    • Digital flow meter for high-volume applications
    • Optimized for air and oxygen
    • Suitable for medical ventilation
    • Product Page
    • Datasheet
    • Contact

    Mass Flow Meter SFM3100

    Sensirion Mass Flow Meters SFM3100
    • Versatile analog flow meter
    • Additional temperature sensor
    • Small form factor
    • Product Page
    • Datasheet
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    Mass Flow Meter SFM3119

    Sensirion Mass Flow Meter SFM3119
    • Versatile digital flow meter
    • Compact form factor
    • Low pressure drop
    • Product Page
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    Mass Flow Meter SFM3200

    Sensirion Mass Flow Meters SFM3200
    • Inspiratory flow meter for respiratory applications
    • Autoclavable / washable version available
    • Extremely good low-power performance and low pressure drop
    • Product Page
    • Datasheet
    • Contact

    Mass Flow Meter SFM3300

    Sensirion Mass Flow Meters SFM3300 3200 Kombi
    • Fully calibrated proximal flow sensor for respiratory applications
    • Small dead space and low pressure drop
    • Single-use and autoclavable / washable version
    • Product Page
    • Datasheet
    • Contact

    Mass Flow Meter SFM3400

    • Neonatal proximal flow meter, fully calibrated
    • Small dead space and low pressure drop
    • Single-use and autoclavable / washable version
    • Product Page
    • Datasheet
    • Contact

    Mass Flow Meter SFM4100

    Sensirion Mass Flow Meters SFM4100
    • Versatile digital flow meter
    • Pressure stable up to 6 bar
    • For gas mixing applications (e.g. anaesthesia)
    • Product Page
    • Datasheet
    • Contact

    Mass Flow Meter SFM4200

    • Versatile digital flow meter
    • Pressure stable up to 8 bar
    • Downmount connector for manifold integration
    • Product Page
    • Datasheet
    • Contact

    Mass Flow Meter SFM4300

    Sensirion Mass Flow Meter SFM4300
    • Compact
    • High precision and sensitivity
      (esp. for low flow rates) 
    • Flow range: 0 to 20 slm
    • Product Page
    • Contact

    Mass Flow Meter SFM5300

    Sensirion Mass Flow Meters SFM5300
    • Compact high-precision flow meter
    • Wide dynamic measurement range
    • Only for cost-sensitive OEM projects with high unit quantities
    • Product Page
    • Datasheet
    • Contact

    Mass Flow Meter SFM5400

    Sensirion Mass Flow Meters SFM5400
    • Versatile high-precision flow meter
    • Metal body, pressure stable up to 10 bar
    • Wide range of gas calibrations and flow ranges
    • Product Page
    • Datasheet
    • Contact

    Mass Flow Sensor ASF1400/1430

    Sensirion Mass Flow Meters ASF1400
    • Product Page
    • Datasheet
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    Mass Flow Meter EM1 (End of Life)

    Sensirion Mass Flow Meters EM1
    • Product Page
    • Datasheet
    • Contact

    Mass Flow Meter Evaluation Kits

    • Product Page
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    Customized (OEM) Mass Flow Meters

    Sensirion Customized Solutions
    • Low pressure drop flow sensors
    • Various flow ranges and gases
    • Individualized interface and output characteristics, adapted packaging
    • Low-cost flow sensor solutions
    • Product Page
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    SFM3xxx Sensor Platform for Flow Measurement in Respiratory Devices

    With the SFM3xxx flow platform, Sensirion offers its customers the right sensor for all flow measurements and underscores its worldwide expertise in the field of medical ventilation. The platform consists of multiple flow sensors with comprehensive capabilities for a diverse range of medical applications. All the sensors of the SFM3xxx platform share characteristics such as high precision and robustness. All are fully calibrated and temperature-compensated sensors and measure the flow rates of air and other non-corrosive gases bidirectionally and accurately. They also impress with very low pressure drop and fast signal processing times.

    Read more


    What We Offer

    1. Expert first contact

    • Specialized and experienced sales force
    • Worldwide presence with a global distribution network

    2. Fast and easy product evaluation

    • Comprehensive product portfolio
    • Easy-to-use evaluation kits for effortless measurement during sensor evaluation
    • Technical documents - data sheets, sample code, application notes

    3. Customized solutions

    • Low pressure drop flow sensors
    • Various flow rates and a variety of gases (multigas option)
    • Disposable sensor solutions
    • Low-cost flow sensor solutions


    Read more about our customized sensor solutions.

     4. Design-in support

    • Assistance in the integration of Sensirion's sensors into your application
    • Proven best practices to ensure that your production concept accommodates the requirements of SFMxx sensors
    Sensirion Gas Flow What We Offer Illustration

    5. Lifetime support

    • Reliable and flexible production
    • Sustainable product innovation roadmap to meet your future needs

    Sensirion Icon Download

    Download Center

    Here you can find all documents of Sensirion's mass flow meters for download.


    CMOSens® Technology


    All our sensor products are based on the unique CMOSens® Technology which integrates the sensor component and the evaluation circuit on a single chip. This not only enables a precise and reliable measurement of mass flow but also ensures an outstanding long-term stability of our products. 

    Learn more about the innovative CMOSens® Technology and the advantages it brings regarding the measurement of mass flow.

    Markets

    Building Technology

    Climate parameter measurements form the basis for a pleasant room climate with minimum energy consumption. Temperature, humidity, air flow and pressure differences are not the only relevant parameters. 

    More about the building technology sector

    Industrial Automation

    With our experience in industrial automation, we can support you with optimal solutions for your devices, machines and processes. Find more information about our expertise in the industrial sector and other aspects.

    More about industrial automation

    Medical

    We know what it takes to be competitive in the medical sector, since only the best products survive in the long term. Sensirion stands for innovative products, customer-specific solutions and optimal Support.

    More about the medical sector

    Smart Energy

    Our goal is to make the world smarter, more comfortable and environmentally sound through our products. For us, smart energy means sensor products that make it easier to monitor energy consumption in real time. With that knowledge, we can not only use resources more efficiently, but also improve the operating lives of the measuring devices.

    More about smart energy


    Related Products

    Sensirion Mass Flow Meter SFM3019

    Mass Flow Meter SFM3019

    The SFM3019 is a digital flow meter especially suitable for high-volume applications. It is based on the existing SFM3000 and has been optimized to meet the high demand for inspiratory devices caused by the COVID-19 pandemic.

    Sensirion Mass Flow Meters SFM3000

    Mass Flow Meter SFM3000

    The digital SFM3000 mass flow meter excels in accuracy, fast response time and low pressure drop, making it highly suitable for cost-sensitive flow measurements in medical and industrial applications.

    Sensirion Mass Flow Meters SFM3100

    Mass Flow Meter SFM3100

    The analog SFM3100 mass flow meter as a compact design and can be easily integrated into existing systems. An integrated temperature sensor eliminates the need to install an additional sensor.

    Sensirion Mass Flow Meters SFM3200

    Mass Flow Meter SFM3200

    The fully calibrated SFM3200 is suitable for inspiratory flow measurement. In addition, an autoclavable / washable version (SFM3200-AW) for expiratory flow measurements is available.

    Sensirion Mass Flow Meters SFM3300 3200 Kombi

    Mass Flow Meter SFM3300

    The SFM3300 proximal flow sensor features excellent measuring accuracy, robustness and a short signal processing time. The fully calibrated sensor measures bidirectional flow ranges of up to 250 slm.

    Mass Flow Meter SFM3400

    The SFM3400 is a proximal flow sensor for neonatal and pediatric application in respiratory devices. It is fully calibrated and temperature compensated and features high accuracy and a fast update time.

    Sensirion Mass Flow Meters SFM4100

    Mass Flow Meter SFM4100

    The SFM4100 flow meter provides excellent long-term stability and freedom from drift. It is the first choice for devices with a high usage rate and at the same time long service intervals.

    Sensirion Mass Flow Meters SFM5400

    Mass Flow Meter SFM5400

    The SFM5400 mass flow meter is the valve-free version of the SFC5400 mass flow controller. It measures mass flows with outstanding accuracy and repeatability and has a wide dynamic measurement range.

    Sensirion Mass Flow Meters SFM5300

    Mass Flow Meter SFM5300

    The SFM5300 mass flow meter is the compact and reduced version of the SFM5400 mass flow meter. It is exclusively for cost-sensitive OEM projects with high unit quantities.

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