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    • Home
    • Environmental Sensors
      • Humidity Sensors
        • Digital Humidity Sensor SHT4x (RH/T)
        • Digital Humidity Sensor SHT3x (RH/T)
        • Digital Humidity Sensor SHT85 (RH/T)
        • Digital Humidity Sensor SHTC3 (RH/T)
        • Digital Humidity Sensor SHTC1 (RH/T)
        • Digital Humidity and Temperature Module SCC30-DB (RH/T)
        • SF2 Filter Cap
        • SHT31 Smart Gadget Development Kit
        • Digital Humidity Sensor SHTW2 (RH/T) (NRND)
      • Temperature Sensors
        • Temperature Sensor STS3x
        • Temperature Sensor STS32
      • Multi-Pixel Gas Sensors SGP
        • VOC Sensor SGP40
        • VOC Sensor SGP30 / SGPC3 (NRND)
        • Multi-Gas, Humidity and Temperature Module SVM30 (NRND)
      • Particulate Matter Sensor SPS30
      • Carbon Dioxide Sensors
        • Carbon Dioxide Sensor SCD4x
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      • CO2 Sensor STC31

        The most efficient way to measure high CO2 concentrations

        The STC31 is a chip-sized gas concentration sensor for high range, accurate CO2 measurements designed for high-volume production. The sensor is based on a revolutionized thermal conductivity measurement principle, which results in superior repeatability and long-term stability. This makes the STC31 the perfect choice for applications where reliability is key.

        More

    • Flow Sensors
      • Liquid Flow Meters
        • Lx – Compact Liquid Flow Meters
          • Liquid Flow Meter LG16
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        • SLx – Standalone Liquid Flow Meters
          • Liquid Flow Meter SLI
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          • Liquid Flow Meter SLQ-QT105
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        • Liquid Flow Sensor SLF3x
        • Liquid Flow Sensor LPG10
        • Liquid Flow Sensor LD20
        • Liquid Flow Meter Kits
        • Customized (OEM) Liquid Flow Meters
      • Mass Flow Meters for Gases
        • Mass Flow Meter SFM3000
        • Mass Flow Meters SFM3003 and SFM3013
        • Mass Flow Meter SFM3019
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        • Customized (OEM) Mass Flow Meters
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      • Evaluation Kit SEK-Flow Sensing
      • Product Highlight

        Evaluation kit for the single-use liquid flow sensor LD20-2600B

        The LD20-2600B single-use liquid flow sensor for fast, precise and reliable measurements of the lowest flow rates in biomedical applications was successfully launched three years ago. The evaluation kit for this OEM liquid flow sensor can now also be purchased online via Sensirion's distribution network.

        Read more

    • Markets
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      • Our Markets

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        Experts for Smart Sensor Solutions

        Sensirion's sensors are used in a wide range of markets and different applications. Our high-quality environmental and flow sensors and sensor solutions improve energy efficiency and sustainability. They increase our safety, support our health and raise the quality of life. 

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        Sensirion Worldmap

        Sensirion Worldwide

        Founded in 1998 Sensirion has become the leading manufacturer of flow and environmental sensors solutions. The company now employs people in various countries such as the USA, South Korea, Japan, China, Taiwan, and Germany. The headquarters in Switzerland is responsible for research, development, and production. 

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        Learn more: www.sensirion.com/GPTW

         

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    • Home
    • Flow Sensors
    • Liquid Flow Meters
    • SLx – Standalone Liquid Flow Meters

    SLx – Standalone Liquid Flow Meters

    The SLI, SLS, SLQ, and SLG liquid flow meters all feature a robust IPxx protected housing and the same 4-pin M8 connector. In combination with the SCC1-USB, RS485, or analog sensor cables, they provide a modular solution that covers a wide range of flow rates from single-digit nanoliters per minute up to several hundred milliliters per minute, and a suitable electrical interface for almost any environment:

    • SCC1-USB sensor cable for laboratory and desktop use provides a plug-and-play connection to a PC for operation with Sensirion’s viewer software or user-built programs.
    • SCC1-RS485 sensor cable for demanding industrial automation environments features a stable RS485 interface and includes advanced functionalities such as dispense volume totalizer, automatic dispense detection and data buffer for asynchronous read-out.
    • SCC1-Analog sensor cable for simple and quick readings without programming or for integration into generic controller systems. In addition to a 0-10 V analog voltage output, the cable provides a configurable digital (high/low) output that can be programmed to act as a flow switch or as a pulse output. 


    The SLx liquid flow meters are the first choice for standalone applications in industrial automation systems, laboratory set-ups, bench-top testing, and technology evaluation. The robust housing (IP53 or higher) protects them from dust or accidental spills.


    Overview of SLx Liquid Flow Meters:

    Liquid Flow MeterApplicationsMax. flow rate
    (calibration medium)
    Interface options (connector)Wetted materialsSpecific characteristicsLinks
    SLGSensirion Liquid Flow Meters SLG
    • Liquid chromatography
    • High-pressure/ultra-
      low flow Analytical instruments
    • Leakage testing
    • Microfluidics
    8 µl/min (H2O)RS485, I2C, USB or analog (4-pin M8 male)Stainless steel,
    PEEK and fused
    Silica
    • 3 sensor versions cover different flow ranges
    • Max. operating pressure up to 1200 bar (17500 psi)
    • Datasheet
    • Website
    • Contact
    • Buy now
    SLILiquid Flow Meter SLI
    • General process monitoring
    • Pump control
    • Monitoring of fuel flow
    • Lubricants dosage monitoring
    • Conformal coating
    • Leakage detection

    5 ml/min (H2O)

    80 ml/min (IPA)

    RS485, I2C, USB or analog (4-pin M8 male)Quartz glass, PEEK; 
    Borosilicate Glass 3.3,
    PEEK, FEP
    • 3 sensor versions cover different flow ranges
    • IP65 water and dust protection
    • Datasheet
    • Website
    • Contact
    • Buy now
    SLS-1500Liquid Flow Meter SLS-1500
    • Diagnostics
    • Analytical instruments
    • Biomedical devices
    • Industrial automation
    • Fuel cells
    40 ml/min (H2O)RS485, I2C, USB or analog (4-pin M8 male)PTFE, PEEK, and 904L
    high-performance
    stainless steel
    • Response time: 20 ms
    • Datasheet
    • Website
    • Contact
    • Buy now
    SLQ-QT105Liquid Flow Meter SLQ-QT105
    • High-end semiconductor
      process control
    • Photoresist dispensing
    • Fast dosing operations
    120 ml/min (IPA)RS485, I2C, USB or analog (4-pin M8 male)PCTFE, PFA, and
    quartz glass
    • For hydrocarbon based liquids only
    • High purity quartz and fluoropolymer wetted materials
    • Datasheet
    • Website
    • Contact
    SLQ-QT500Liquid Flow Meter SLQ-QT500
    • Process control
    • Industrial automation
    • High-viscosity applications
    • Paint and glue dispensing
    • Photoresist dispensing
    120 ml/min
    (H20 and IPA)
    RS485, I2C, USB or analog (4-pin M8 male)PFA, and quartz glass
    capillary
    • PFA tubes for fluidic connection (6.35 mm / 1/4'' OD, 4.35mm ID)
    • High-purity quartz and fluoropolymer wetted materials
    • Datasheet
    • Website
    • Contact
    • Buy now
    • Download table as PDF

    Lx - Compact Liquid Flow Meters

    If you can't find what you are looking for, please have a look at our Lx liquid flow meters. They are ideal for industrial and diagnostic OEM applications, i.e. for integration of the liquid flow meter into a device or instrument in larger quantities.


    Sensirion Icon Download

    Download Center

    Here you can find all documents of Sensirion's liquid flow meters for download.


    Fly through Sensirion's Liquid Flow Meter

    Liquid Dispense Monitoring


    Related Products

    Liquid Flow Sensor SLF3x

    The SLF3x with a radically optimized mechanical design, takes the well-established functionality to the next level in price-performance ratio. The sensor maximizes safety, stability and long-term reliability in a vast range of applications.

    Sensirion Liquid Flow Meters SLI

    Liquid Flow Meter SLI

    The SLI mass flow meter series for liquids are for integration into demanding fluidic systems, ensures highly accurate measurements at low flow rates, and makes reliable and accurate dosage possible.

    Sensirion Liquid Flow Meters SLG

    Liquid Flow Meter SLG

    The SLG flow meter series is ideal for monitoring rapidly changing ultralow flow rates in UHPLC applications and provides high pressure resistance of the flow channel and fast response time.

    Sensirion Liquid Flow Meters SLQ-QT105

    Liquid Flow Meter SLQ-QT105

    The SLQ-QT105 flow meter is characterized by high sensitivity, reliability, and speed, and is ideally suited for measuring hydrocarbon-based liquids like photoresists and solvents.

    Sensirion Liquid Flow Meters SLQ QT500

    Liquid Flow Meter SLQ-QT500

    The versatile SLQ-QT500 flow meter measures flow rates of 0–120 ml/min. for water-based as well as hydrocarbon-based liquids and is suitable for a variety of dosing and flow applications.

    Sensirion Liquid Flow Meters Flow Meter Kit SLI

    Liquid Flow Meter Kits

    For quick and easy measurements of all liquid flow meters, a test kit can be ordered. The liquid flow meter kit provides a first impression of the performance of the sensors.

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