Mass Flow Controllers for Gases
Mass Flow Controllers for Gases
Available with industry-leading lead times
Sensirion is your reliable partner that can offer best-in-class lead times thanks to our forward-looking and customer-oriented supply chain management.
Our versatile SFC5400 is suitable for industrial and medical applications and comes in various configurations to fulfill your exact needs. Contact us to find the right product for your application. With our SFC5500 product line, we offer versatile off-the-shelf mass flow controllers equipped with multiple gas calibrations. This product range is available through our online distribution partners with overnight shipping.
Our many years of experience in industrial automation and medical technology support your devices, machines and processes with optimal solutions. Sensirion's mass flow controllers are characterized by fast and accurate control of gas flow over a wide dynamic range.
Based on the innovative CMOSens® Technology, the heart of these mass flow controllers is a calorimetric microsensor (MEMS), which is integrated with the complete signal conditioning electronics on one single chip. While the flow is measured using the thermal measurement principle, efficient control is provided by a PID control circuit. This unique integrated technological approach results in excellent performance and reliability - at a very attractive cost.
SFC5400 for highest performance and versatility
- Excellent accuracy and repeatability
- Very wide control range and ultra-fast settling time
- No drift and no re-calibration required in the field
- Various communication interfaces and mechanical fittings
- Multi-gas and multi-range option
- Also available as mass flow meter
SFC5300 for high volume applications
- Compact, lighter and reduced version of the SFC5400 with digital interface
- Exclusively for cost-sensitive OEM projects with high unit quantities
- Various flow ranges from 50 sccm to 5 slm and calibration for various gases
- Also available as mass flow meter
SFC5500 for first evaluation
- Available via catalogue distribution
- Special version of the SFC5400 with predefined, digital configurations
- Calibrated for multiple gases and with exchangeable fittings
- For first evaluations and tests
EK-F5X for easy and fast testing
- Simple test set for the evaluation and qualification of the SFC5X00 mass flow controllers and SFM5X00 mass flow meters
- Precise measurements for test purposes can be made quickly and inexpensively with this easy-to-use kit
- Content: a RS485-to-USB adapter cable, a 100/240 V AC adapter, a USB memory stick with PC software, start-up guide
Get an Overview of Sensirion's Mass Flow Controllers for Gases
| SFC5400 | SFM5400 | SFC5300 | SFM5300 | |||
|---|---|---|---|---|---|---|
| Flow range | 50, 100, 200, 500 sccm; 1, 2,5,10 slm | 20, 50, 100 slm | 50, 100, 200, 500 sccm; 1, 2,5,10 slm | 20, 50, 100 slm | 50, 100, 200, 500 sccm; 1, 2,5 slm | |
| Repeatability, % of reading | 0.1% s.p. | 0.2% s.p. | 0.1% s.p. | 0.2% s.p. | 0.2% s.p. | |
| Repeatability, % of full scale | 0.01% FS | 0.02% FS | 0.01% FS | 0.02% FS | 0.02% FS | |
| Accuracy, % of reading | 0.8% s.p. | 1% s.p. | 0.8% s.p. | 1% s.p. | 2% s.p. | |
| Accuracy, % of full scale | 0.08% FS | 0.1% FS | 0.08% FS | 0.1% FS | 0.2% FS | |
| External leak rate | 9 x 10-9 mbar l/s (He) | 10 x 10-6 mbar l/s (He) | 9 x 10-9 mbar l/s (He) | 10 x 10-6 mbar l/s (He) | 1 x 10-6 mbar l/s (He) | |
| Leak rate through closed valve | 1 x 10-6 mbar l/s (He) | 1 x 10-6 mbar l/s (He) | not applicable for SFM | not applicable for SFM | 1 x 10-6 mbar l/s (He) | not applicable for SFM flow meter version |
| Pressure drop at max full scale | < 2 bar | < 3 bar | < 0.1 bar | < 1 bar | < 2 bar | < 0.1 bar |
| Settling time for OEM | 50 ms | not applicable for SFM flow meter version | 50 ms | not applicable for SFM flow meter version | ||
| Settling time, typical | 100 ms | not applicable for SFM flow meter version | 100 ms | not applicable for SFM flow meter version | ||
| Control range | 1000:1 (digital interface) | not applicable for SFM flow meter version | 1000:1 | not applicable for SFM flow meter version | ||
| Communication interface | digital(RS485, IO-Link, DeviceNet) and analog (0 to 5 VDC, 0 tp 10 VDC or 4 to 20 mA) | digital (RS485 & IO-Link) | ||||
| Real gas calibration | Air/N2, H2, O2, He, Ar, CO2 | |||||
| Gas conversion | SF6, CF4, C4F8, NH3, N2O, CO, CH4, CH3F, Xe, Ne, Kr, and other gases on request | |||||
| Nominal power supply | 14.0 to 26.0 VDC | |||||
| Electric connector | D-Sub, 9 Pin | |||||
| Mounting, gas connector | Downmount, Swagelok, VCR, VCO, Legris, UNF Thread | Downmount | ||||
| Max working pressure | 10 bar | |||||
| Operation temperature | 0 to 50 °C/32 to 122 °F | |||||
| Gas type switchable by software | on request | |||||
Customized Solutions
Our cutting-edge sensor technology combined with our wealth of experience as a solution provider enables us to support high performance gas flow control systems with customized sensors and controllers. Our goal in doing so is to develop a deep understanding of the requirements of our customers, which can then form the basis for a tailor-made solution. Thanks to our outstanding technology, our customers benefit from several advantages:
- High speed flow control
- Flexibility and cost Efficiency
- Low flow capabilities
- Compact and lightweight
CMOSens® Technology
All our sensor products are based on the unique CMOSens® Technology which integrates the sensor component and the evaluation circuit on a single chip. This not only enables a precise and reliable measurement of mass flow but also ensures an outstanding long-term stability of our products.
Learn more about the innovative CMOSens® Technology and the advantages it brings regarding the measurement of mass flow.
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