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      • Formaldehyde Sensor SFA30

        Formaldehyde Sensing Made Easy

        The SFA30 is Sensirion’s new digital formaldehyde sensor designed for easy integration into air purifiers, demand-controlled ventilation systems, or indoor air quality monitors. Based on Sensirion’s electrochemical technology, the SFA30 offers excellent formaldehyde sensing performance with a uniquely low cross-sensitivity to other VOCs. The sensor module’s on-board SHT sensor provides accurate humidity and temperature readings and enables a fully temperature/humidity compensated and factory calibrated formaldehyde concentration output in ppb.

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      • Evaluation Kit SEK-Flow Sensing
      • Product Highlight

        Evaluation kit for the single-use liquid flow sensor LD20-2600B

        The LD20-2600B single-use liquid flow sensor for fast, precise and reliable measurements of the lowest flow rates in biomedical applications was successfully launched three years ago. The evaluation kit for this OEM liquid flow sensor can now also be purchased online via Sensirion's distribution network.

        Read more

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        Experts for Smart Sensor Solutions

        Sensirion's sensors are used in a wide range of markets and different applications. Our high-quality environmental and flow sensors and sensor solutions improve energy efficiency and sustainability. They increase our safety, support our health and raise the quality of life. 

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        Founded in 1998 Sensirion has become the leading manufacturer of flow and environmental sensors solutions. The company now employs people in various countries such as the USA, South Korea, Japan, China, Taiwan, and Germany. The headquarters in Switzerland is responsible for research, development, and production. 

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        Learn more: www.sensirion.com/GPTW

         

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    • Mass Flow Controllers for Gases

      High precise, ultra fast und long-term stable control of gas flow.

    • Home
    • Flow Sensors
    • Mass Flow Controllers for Gases

    Mass Flow Controllers for Gases

    Our many years of experience in industrial automation and medical technology support your devices, machines and processes with optimal solutions. Sensirion's mass flow controllers are characterized by fast and accurate control of gas flow over a wide dynamic range.

    Based on the innovative CMOSens® Technology, the heart of these mass flow controllers is a calorimetric microsensor (MEMS), which is integrated with the complete signal conditioning electronics on one single chip. While the flow is measured using the thermal measurement principle, efficient control is provided by an analog controlling circuit. This unique integrated technological approach results in excellent performance and reliability - at a very attractive cost.


    Products

    Sensirion Mass Flow Controllers SFC5400

    Mass Flow Controller SFC5400

    The SFC5400 mass flow controller enables extremely precise and repeatable control over a wide dynamic measuring range and is the ideal solution for various industrial and medical applications.

    Sensirion Mass Flow Controllers SFC5300

    Mass Flow Controller SFC5300

    The SFC5300 mass flow controller is the compact and reduced version of the SFC5400 mass flow controller. It is exclusively for cost-sensitive OEM projects with high unit quantities.

    Both products are also available as mass flow meters. The SFM5400 and SFM5300 mass flow meters are based on the same platform with similar performance characteristics.


    Get an Overview of Sensirion's Mass Flow Controllers for Gases

     SFC5400SFC5300
    Flow range

    50, 100, 200, 500 sccm; 1, 2, 5, 10 slm

    20, 50, 100 slm

    50, 100, 200, 500 sccm; 1, 2, 5, 10 slm

    Repeatability0.1% s.p./FS0.2% s.p./FS0.2% s.p./FS
    Accuracy0.8% s.p./FS1% s.p./FS2% s.p./FS
    External leak rate9 x 10-9 mbar l/s (He)10 x 10-6 mbar l/s (He)1 x 10-6 mbar l/s (He)
    Leak rate through closed valve1 x 10-6 mbar l/s (He)1 x 10-6 mbar l/s (He)

    1 x 10-6 mbar l/s (He)

    Pressure drop at max full scale< 2 bar< 3 bar < 2 bar< 0.1 bar
    Settling time for OEM/typ.50 ms/100ms50 ms/100ms
    Control range1000:1 (digital interface)1000:1 (digital interface)
    Communication interfacedigital (RS485, IO-Link, DeviceNet), analog (0 to 5 VDC, 0 to 10 VDC or 4 to 20 mA)digital (RS485)
    Real gas calibrationAir/N2, H2, O2, He, Ar, CO2Air/N2, H2, O2, He, Ar, CO2
    Gas conversionSF6, C4F8 and other gases on requestSF6, C4F8 and other gases on request
    Nominal power supply14.0 to 26.0 VDC14.0 to 26.0 VDC
    Electric connectorD-Sub, 9 PinD-Sub, 9 Pin
    Mounting, gas connectionDownmount, Swagelok, VCR, VCO, W-SealDownmount
    Max working pressure10 bar10 bar
    Operation temperature0 to 50°C / 32 to 122°F0 to 50°C / 32 to 122°F

     

     


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    Download Center

    Here you can find all documents of Sensirion's mass flow controllers for download.


    Customized Solutions

    Our cutting-edge sensor technology combined with our wealth of experience as a solution provider enables us to support high performance gas flow control systems with customized sensors and controllers. Our goal is to develop a deep understanding of the requirements of our customers, which can then form the basis for a tailor-made solution. Our customized OEM sensor solutions are adapted or newly developed to your specific demands. With our technology, we have the flexibility to ensure both high performance and cost efficiency. Read more.

     

     


    Simple Evaluation with the EK-F5x

    Sensirion Mass Flow Controllers EK F5x

    The EK-F5x evaluation kit is a simple test set for the evaluation and qualification of Sensirion's SFC5x mass flow controller series and SFM5x mass flow meter series. Precise measurements for test purposes can be made quickly and inexpensively with this easy-to-use kit. The evaluation kit consists of a RS485-to-USB adapter cable, a 100/240 V AC adapter, a USB memory stick with PC software, and is designed for RS485 based mass flow controllers. Learn more.


    What We Offer

    1. Expert first contact

    • Specialized and experienced sales force
    • Worldwide presence with a global distribution network

    2. Fast and easy product evaluation

    • Comprehensive product portfolio
    • Easy-to-use evaluation kits for effortless measurement during sensor evaluation
    • Technical documents - data sheets, sample code, application notes

    3. Customized solutions

    • Low pressure drop flow sensors
    • Various flow rates and a variety of gases (multigas option)
    • Disposable sensor solutions
    • Low-cost flow sensor solutions


    Read more about our customized sensor solutions.

     4. Design-in support

    • Assistance in the integration of Sensirion's sensors into your application
    • Proven best practices to ensure that your production concept accommodates the requirements of SFMxx sensors
    Sensirion Gas Flow What We Offer Illustration

    5. Lifetime support

    • Reliable and flexible production
    • Sustainable product innovation roadmap to meet your future needs

    CMOSens® Technology


    All our sensor products are based on the unique CMOSens® Technology which integrates the sensor component and the evaluation circuit on a single chip. This not only enables a precise and reliable measurement of mass flow but also ensures an outstanding long-term stability of our products. 

    Learn more about the innovative CMOSens® Technology and the advantages it brings regarding the measurement of mass flow.

    Markets

    Medical

    We know what it takes to be competitive in the medical sector, since only the best products survive in the long term. Sensirion stands for innovative products, customer-specific solutions and optimal Support.

    More about the medical sector

    Industrial Automation

    With our experience in industrial automation, we can support you with optimal solutions for your devices, machines and processes. Find more information about our expertise in the industrial sector and other aspects.

    More about industrial automation


    Related Products

    Sensirion Mass Flow Controllers EK F5x

    Evaluation Kit EK-F5x

    The EK-F5x evaluation kit is a simple test set for the evaluation and qualification of the SFC5400 mass flow controller. Precise measurements for test purposes can be made quickly and inexpensively.

    Sensirion Customized Solutions

    Customized (OEM) Mass Flow Controllers

    Besides the standard gas flow sensor solutions, we also offer customized OEM sensor solutions at an attractive price performance ratio. We adapt or develop your customized mass flow controllers.

    Sensirion Mass Flow Controllers SFC5400

    Mass Flow Controller SFC5400

    The SFC5400 mass flow controller enables extremely precise and repeatable control over a wide dynamic measuring range and is the ideal solution for various industrial and medical applications.

    Sensirion Mass Flow Controllers SFC5300

    Mass Flow Controller SFC5300

    The SFC5300 mass flow controller is the compact and reduced version of the SFC5400 mass flow controller. It is exclusively for cost-sensitive OEM projects with high unit quantities.

    Sensirion Mass Flow Meters SFM5400

    Mass Flow Meter SFM5400

    The SFM5400 mass flow meter is the valve-free version of the SFC5400 mass flow controller. It measures mass flows with outstanding accuracy and repeatability and has a wide dynamic measurement range.

    Sensirion Mass Flow Meters SFM5300

    Mass Flow Meter SFM5300

    The SFM5300 mass flow meter is the compact and reduced version of the SFM5400 mass flow meter. It is exclusively for cost-sensitive OEM projects with high unit quantities.

    Your Contact to Sensirion

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