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    Sensirion AG Switzerland
    • Home
    • Environmental Sensors
      • Humidity Sensors
        • Digital Humidity Sensor SHT4x (RH/T)
        • Digital Humidity Sensor SHT3x (RH/T)
        • Digital Humidity Sensor SHT85 (RH/T)
        • Digital Humidity Sensor SHTC3 (RH/T)
        • Digital Humidity Sensor SHTC1 (RH/T)
        • Digital Humidity and Temperature Module SCC30-DB (RH/T)
        • SF2 Filter Cap
        • SHT31 Smart Gadget Development Kit
        • Digital Humidity Sensor SHTW2 (RH/T) (NRND)
      • Temperature Sensors
        • Temperature Sensor STS3x
        • Temperature Sensor STS32
      • Multi-Pixel Gas Sensors SGP
        • VOC Sensor SGP40
        • VOC Sensor SGP30 / SGPC3 (NRND)
        • Multi-Gas, Humidity and Temperature Module SVM30 (NRND)
      • Particulate Matter Sensor SPS30
      • Carbon Dioxide Sensors
        • Carbon Dioxide Sensor SCD4x
        • Carbon Dioxide Sensor SCD30
        • Carbon Dioxide Sensor STC31
      • Formaldehyde Sensor Module SFA30
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      • Formaldehyde Sensor SFA30

        Formaldehyde Sensing Made Easy

        The SFA30 is Sensirion’s new digital formaldehyde sensor designed for easy integration into air purifiers, demand-controlled ventilation systems, or indoor air quality monitors. Based on Sensirion’s electrochemical technology, the SFA30 offers excellent formaldehyde sensing performance with a uniquely low cross-sensitivity to other VOCs. The sensor module’s on-board SHT sensor provides accurate humidity and temperature readings and enables a fully temperature/humidity compensated and factory calibrated formaldehyde concentration output in ppb.

        More

    • Flow Sensors
      • Liquid Flow Meters
        • Lx – Compact Liquid Flow Meters
          • Liquid Flow Meter LG16
          • Liquid Flow Meter LG01
          • Liquid Flow Meter LS32-1500
        • SLx – Standalone Liquid Flow Meters
          • Liquid Flow Meter SLI
          • Liquid Flow Meter SLG
          • Liquid Flow Meter SLQ-QT105
          • Liquid Flow Meter SLQ-QT500
          • Liquid Flow Meter SLS-1500
        • Liquid Flow Sensor SLF3x
        • Liquid Flow Sensor LPG10
        • Liquid Flow Sensor LD20
        • Liquid Flow Meter Kits
        • Customized (OEM) Liquid Flow Meters
      • Mass Flow Meters for Gases
        • Mass Flow Meter SFM3000
        • Mass Flow Meters SFM3003 and SFM3013
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      • Evaluation Kit SEK-Flow Sensing
      • Product Highlight

        Evaluation kit for the single-use liquid flow sensor LD20-2600B

        The LD20-2600B single-use liquid flow sensor for fast, precise and reliable measurements of the lowest flow rates in biomedical applications was successfully launched three years ago. The evaluation kit for this OEM liquid flow sensor can now also be purchased online via Sensirion's distribution network.

        Read more

    • Markets
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      • Our Markets

        Sensirion Markets Icons

        Experts for Smart Sensor Solutions

        Sensirion's sensors are used in a wide range of markets and different applications. Our high-quality environmental and flow sensors and sensor solutions improve energy efficiency and sustainability. They increase our safety, support our health and raise the quality of life. 

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        Sensirion Worldmap

        Sensirion Worldwide

        Founded in 1998 Sensirion has become the leading manufacturer of flow and environmental sensors solutions. The company now employs people in various countries such as the USA, South Korea, Japan, China, Taiwan, and Germany. The headquarters in Switzerland is responsible for research, development, and production. 

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    • Sensirion Technology

      CMOSens® Technology

      All Sensirion products are characterized by the fusion of the sensor element and the signal conditioning electronics on a single silicon CMOS chip.

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    • Sensirion – The Sensor Company
    • CMOSens® Technology

    CMOSens® Technology for Gas Flow and Differential Pressure

    All on One Chip

    At the heart of Sensirion's sensor products is our innovative CMOSens® Technology which enables us to combine the sensor component with signal-processing circuitry on a tiny CMOS silicon chip. The CMOSens® sensor provides error-free gas flow metering that remains stable over long periods of time and generates a very fast, high-precision sensor signal.

    Sensirion CMOSens Chip Illustration

    The Thermal Measurement Principle

    Sensor Component

    The mass flow is determined using a thermal measurement principle. An adjustable heating element is positioned at the center of a pressure-stabilized membrane, with a temperature sensor both upstream and downstream of the membrane in the direction of gas flow. Every flow of gas over the membrane causes a thermal transfer of heat to the temperature sensor positioned downstream and, because of the resulting temperature difference, creates a precisely measurable signal. The microthermal flow sensor is integrated by etching the pressure-stabilized membrane, which has a passivation glass layer, into the silicon chip. The CMOSens® Technology integrates this miniaturized sensor together with the entire high-precision processing circuitry on a tiny CMOS microchip.

    Sensirion Gas Flow Measurement Principle

    Amplification and the Analog-to-Digital Converter

    Integrated on the same chip, not even a millimetre away from the sensor component, are an analog-to-digital converter and a signal amplifier, which both contribute to the precision of the measurement. Sources of error are minimized and fault-prone solder points eliminated. This drastically improves the signal-to-noise ratio and reduces the risk of failure.

    Temperature and Pressure Compensation

    Likewise on the same chip is a temperature sensor, which emits a signal that compensates for any arising temperature effects. This enables high-precision measurement over a wide temperature range without the need for additional temperature compensation. It also removes the necessity for additional corrective sensors and, as a result, makes Sensirion technology a very low-cost, space-saving solution.

    Digital Calibration

    Apart from this, the chip features digital signal-processing circuitry and an EEPROM memory cell to store calibration data. Every sensor manufactured by Sensirion is individually calibrated during production. As a result, the signal received by the sensor chip is always fully calibrated, linearized and temperature-compensated.

    Digital Communication

    The signal processing circuitry on the chip also includes the digital communication interface. It uses an I2C protocol, the standard for communication between the various components on the circuit board.

    Gas Quality Compensation

    Sensirion's microthermal gas meter modules are equipped with integrated gas recognition. An innovative, high-tech algorithm recognizes various gas mixtures and compensates for them. Gas quality compensation, as it is known, permits accurate and reliable flow metering despite differing gas qualities.

    Metering Techniques

    Based on the described microthermal metering principle, Sensirion supplies a range of products for various metering needs.

    Flow Metering

    With Differential Pressure Sensors

    Because of the metering principle used, our differential pressure sensors are highly suitable for measuring gas flows in a bypass configuration. Most products intended to measure mass flow are designed with a bypass configuration in which the main flow is guided through a straight channel. A flow restrictor forces a small amount of air through a bypass channel in which the sensor is positioned.

    And with Flow Sensors

    The sensor chip can also be placed in the main flow channel, which eliminates the need for a bypass. The main advantage using mass flow meters is higher sensitivity for very low flow rates.

    Differential Pressure Metering

    The pressure connectors in the differential pressure sensors can be connected up to two different air or gas volumes. In the case of a pressure difference, a tiny flow, limited by a small restrictor, passes through the flow channel and is measured by the sensor chip. Sensirion's differential pressure sensors replace traditional diaphragm gas meters and offer many advantages as regards precision and reliability.

    Flow Controller

    When a valve with a fast control algorithm is inserted, the CMOSens® Technology is highly suitable for controlling gas flow rates. The mass flow controllers from Sensirion have an extremely fast control speed and a wide control range.

    Overview

    In summary, we can say that CMOSens® Technology replaces traditional measuring techniques and offers a wealth of benefits, mainly in terms of speed and precision.
    Other advantages of the technology include:

    • Long-term stability with no zero-point drift
    • Accuracy and reproducibility (over a wide dynamic metering range)
    • Fast response times
    • Sensitivity
    • Reliability and robustness

    Back to Overview CMOSens® Technology


    More Information about Gas Flow Sensors

    Sensirion Mass Flow Meters SFM3000

    Mass Flow Meters for Gases

    Mass flow meters for accurate and reliable measurement of gas flow. Successfully used in medical, HVAC and industrial applications.

    More about mass flow meters for gases

    Sensirion Mass Flow Controllers SFC5400

    Mass Flow Controllers for Gases

    Mass flow controllers for fast and precise control of gas flow. Designed for analytical instruments and different coating processes (photovoltaic or the like).

    More about mass flow controllers for gases

    Sensirion Differential Pressure SDP600

    Differential Pressure Sensors

    Differential pressure sensors for gases. Measures accurately and offset free down to very low rates of differential pressure. Designed for demanding medical and HVAC applications.

    More about differential pressure sensors

    Sensirion Gas Meter Modules SGM70xx G4 G6

    Gas Meter Modules

    Gas meter modules providing a reliable real-time monitoring of gas consumption. Developed for use in gas meters with G1.6, G2.5, G4 or G6 flow ranges. 

    More about gas meter modules

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