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Liquid Flow Meter SLQ-QT105

For Semiconductor Applications

Tailored to the integration in demanding coating systems, the SLQ-QT105 is a semicon grade-sensor solution for flow rates of up to 120 ml/min of hydrocarbon based liquids like photoresists and solvents.

Based on Sensirion's proven thermal microsensor technology, it opens new perspectives in terms of sensitivity, reliability and speed. The short response time of the SLQ-QT105 allows the accurate monitoring of highly dynamic processes such as fast dosing operations. Equipped with fittings for 4x3mm PFA tubing, this reliable device works without any moving parts measuring non-invasively through the wall of a straight flow path. A smart digital interface and robust RS485 communication is offered for long distance and bus capability.

For water-based liquids or highly viscous fluids with flow rates of up to 120 ml/min, please see our liquid flow meter SLQ-QT500.

Sensirion Liquid Flow Meters SLQ-QT105

Features

Maximum flow rate for hydrocarbons: 120 ml/min
Designed for photoresists and solvents
Highest sensitivity down to the lowest flow rates
Fast response time down to 30 ms
RS485, USB or 0-10 V analog voltage output
Superb chemical resistance
Inert wetted materials: PCTFE, PFA, and quartz glass
Assured purity
Straight flow path, no moving parts
Maximum working pressure: 3 bar (high pressure ratings available on request)

Applications

High-end semiconductor process control
Photoresist dispensing
Fast dosing operations

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Related Products

Sensirion Liquid Flow Meters SLI

Liquid Flow Meter SLI

The SLI mass flow meter series for liquids are for integration into demanding fluidic systems, ensures highly accurate measurements at low flow rates, and makes reliable and accurate dosage possible.

Sensirion Liquid Flow Meters SLS 1500

Liquid Flow Meter SLS-1500

The SLS-1500 flow meter enables fast and precise measurements for flow rates of 0–40 ml/min. The inert, wetted materials of the sensor provide outstanding chemical resistance and biocompatibility.

Sensirion Liquid Flow Meters SLQ QT500

Liquid Flow Meter SLQ-QT500

The versatile SLQ-QT500 flow meter measures flow rates of 0–120 ml/min. for water-based as well as hydrocarbon-based liquids and is suitable for a variety of dosing and flow applications.

Sensirion Liquid Flow Meters SLG

Liquid Flow Meter SLG

The SLG flow meter series is ideal for monitoring rapidly changing ultralow flow rates in UHPLC applications and provides high pressure resistance of the flow channel and fast response time.

Sensirion Liquid Flow Meters LG16

Liquid Flow Meter LG16

The small, pressure-resistant LG16 flow meter is used for measuring flow rates of less than 80 ml/min. Thanks to the short response time, the sensor makes it possible to detect air bubbles.

Sensirion Liquid Flow Meters LG01

Liquid Flow Meter LG01

The flow switch and bubble detector LG01 measures flow rates of just a few milliliters per minute and below. It is characterized by excellent biocompatibility and chemical resistance.

Sensirion Liquid Flow Meters LS32 1500

Liquid Flow Meter LS32-1500

The compact LS32-1500 flow meter measures flow rates in the 0–40 ml/min. range, is extremely robust in terms of mechanics and is characterized by its excellent repeatability and fast response time.

Sensirion Liquid Flow Meters Flow Meter Kit SLI

Liquid Flow Meter Kits

For quickly and easily measurements of all SLI, SLS, SLG, or SLQ liquid flow meters, a test kit can be ordered. The liquid flow meter kit provides a first impression of the performance of the sensors.

Sensirion Customized Solutions

Customized (OEM) Liquid Flow Meters

Besides the standard gas flow sensor solutions, we also offer customized OEM sensor solutions at an attractive price performance ratio. We adapt or develop your customized liquid flow meters.

Sensirion Liquid Flow Meters LPGx

Liquid Flow Sensor LPG10

The LPG10 OEM flow sensor on a surface of just 10 mm × 10 mm offers a smart, accurate and fast sensor solution for flow rates of only a few microliters per minute to up to 1 ml/min.

Sensirion Liquid Flow Meters LD20

Liquid Flow Sensor LD20

The single-use LD20 flow sensors measure flow rates within a range of 0–1000 ml/h. The cost-effective sensors enable safe and reliable applications in the field of medical and biomedical technology.