Mass Flow Controllers for Gases
Our many years of experience in industrial automation and medical technology support your devices, machines and processes with optimal solutions. Sensirion's mass flow controllers are characterized by fast and accurate control of gas flow over a wide dynamic range.
Based on the innovative CMOSens® Technology, the heart of these mass flow controllers is a calorimetric microsensor (MEMS), which is integrated with the complete signal conditioning electronics on one single chip. While the flow is measured using the thermal measurement principle, efficient control is provided by an analog controlling circuit. This unique integrated technological approach results in excellent performance and reliability - at a very attractive cost.
Get an Overview of Sensirion's Mass Flow Controllers for Gases
50, 100, 200, 500 sccm; 1, 2, 5, 10 slm
20, 50, 100, 200 slm
50, 100, 200, 500 sccm; 1, 2, 5, 10 slm
|Repeatability||0.1% s.p./FS||0.2% s.p./FS||0.2% s.p./FS|
|Accuracy||0.8% s.p./FS||1% s.p./FS||2% s.p./FS|
|External leak rate||9 x 10-9 mbar l/s (He)||10 x 10-6 mbar l/s (He)||1 x 10-6 mbar l/s (He)|
Leak rate through closed valve1
|1 x 10-6 mbar l/s (He)||1 x 10-6 mbar l/s (He)|
1 x 10-6 mbar l/s (He)
|Pressure drop at max full scale||< 2 bar||< 3 bar||< 2 bar||< 0.1 bar|
Settling time for OEM/typ.1
|50 ms/100ms||50 ms/100ms|
|1000:1 (digital interface)||1000:1 (digital interface)|
|Communication interface||digital (RS485, IO-Link, DeviceNet), analog (0 to 5 VDC, 0 to 10 VDC or 4 to 20 mA)||digital (RS485 & IO-Link)|
|Real gas calibration||Air/N2, H2, O2, He, Ar, CO2||Air/N2, H2, O2, He, Ar, CO2|
|Gas conversion||SF6, CF4, C4F8, NH3, N2O, CH4, CH3F and other gases on request||SF6, CF4, C4F8, NH3, N2O, CH4, CH3F and other gases on request|
|Nominal power supply||14.0 to 26.0 VDC||14.0 to 26.0 VDC|
|Electric connector||D-Sub, 9 Pin||D-Sub, 9 Pin|
|Mounting, gas connection||Downmount, Swagelok, VCR, VCO, W-seal||Downmount|
|Max working pressure||10 bar||10 bar|
|Operation temperature||0 to 50°C / 32 to 122°F||0 to 50°C / 32 to 122°F|
Our cutting-edge sensor technology combined with our wealth of experience as a solution provider enables us to support high performance gas flow control systems with customized sensors and controllers. Our goal is to develop a deep understanding of the requirements of our customers, which can then form the basis for a tailor-made solution. Our customized OEM sensor solutions are adapted or newly developed to your specific demands. With our technology, we have the flexibility to ensure both high performance and cost efficiency. Read more.
Simple Evaluation with the EK-F5x
The EK-F5x evaluation kit is a simple test set for the evaluation and qualification of Sensirion's SFC5x mass flow controller series and SFM5x mass flow meter series. Precise measurements for test purposes can be made quickly and inexpensively with this easy-to-use kit. The evaluation kit consists of a RS485-to-USB adapter cable, a 100/240 V AC adapter, a USB memory stick with PC software, and is designed for RS485 based mass flow controllers. Learn more.
What We Offer
1. Expert first contact
- Specialized and experienced sales force
- Worldwide presence with a global distribution network
2. Fast and easy product evaluation
- Comprehensive product portfolio
- Easy-to-use evaluation kits for effortless measurement during sensor evaluation
- Technical documents - data sheets, sample code, application notes
3. Customized solutions
- Low pressure drop flow sensors
- Various flow rates and a variety of gases (multigas option)
- Disposable sensor solutions
- Low-cost flow sensor solutions
Read more about our customized sensor solutions.
4. Design-in support
- Assistance in the integration of Sensirion's sensors into your application
- Proven best practices to ensure that your production concept accommodates the requirements of SFMxx sensors
5. Lifetime support
- Reliable and flexible production
- Sustainable product innovation roadmap to meet your future needs
All our sensor products are based on the unique CMOSens® Technology which integrates the sensor component and the evaluation circuit on a single chip. This not only enables a precise and reliable measurement of mass flow but also ensures an outstanding long-term stability of our products.
Learn more about the innovative CMOSens® Technology and the advantages it brings regarding the measurement of mass flow.
We know what it takes to be competitive in the medical sector, since only the best products survive in the long term. Sensirion stands for innovative products, customer-specific solutions and optimal Support.
With our experience in industrial automation, we can support you with optimal solutions for your devices, machines and processes. Find more information about our expertise in the industrial sector and other aspects.