SLx – Standalone Liquid Flow Meters
The SLI, SLS, SLQ, and SLG liquid flow meters all feature a robust IPxx protected housing and the same 4-pin M8 connector. In combination with the SCC1-USB, RS485, or analog sensor cables, they provide a modular solution that covers a wide range of flow rates from single-digit nanoliters per minute up to several hundred milliliters per minute, and a suitable electrical interface for almost any environment:
- SCC1-USB sensor cable for laboratory and desktop use provides a plug-and-play connection to a PC for operation with Sensirion’s viewer software or user-built programs.
- SCC1-RS485 sensor cable for demanding industrial automation environments features a stable RS485 interface and includes advanced functionalities such as dispense volume totalizer, automatic dispense detection and data buffer for asynchronous read-out.
- SCC1-Analog sensor cable for simple and quick readings without programming or for integration into generic controller systems. In addition to a 0-10 V analog voltage output, the cable provides a configurable digital (high/low) output that can be programmed to act as a flow switch or as a pulse output.
The SLx liquid flow meters are the first choice for standalone applications in industrial automation systems, laboratory set-ups, bench-top testing, and technology evaluation. The robust housing (IP53 or higher) protects them from dust or accidental spills.
Overview of SLx Liquid Flow Meters:
|Liquid Flow Meter||Applications||Max. flow rate|
|Interface options (connector)||Wetted materials||Specific characteristics||Links|
5 ml/min (H2O)
80 ml/min (IPA)
|RS485, I2C, USB or analog (4-pin M8 male)||Quartz glass, PEEK; |
Borosilicate Glass 3.3,
|40 ml/min (H2O)||RS485, I2C, USB or analog (4-pin M8 male)||PTFE, PEEK, and 904L|
|Response time: 20 ms|
Fast dosing operations
|120 ml/min (IPA)||RS485, I2C, USB or analog (4-pin M8 male)||PCTFE, PFA, and|
|For hydrocarbon based liquids only, high purity quartz and fluoropolymer wetted materials|
|120 ml/min |
(H20 and IPA)
|RS485, I2C, USB or analog (4-pin M8 male)||PFA, and quartz glass|
|PFA tubes for fluidic connection (6.35 mm / 1/4'' OD, 4.35mm ID), high-purity quartz and fluoropolymer wetted materials|
SLI / SLS SERIES
With Sensirion’s liquid flow meter technology in a protected housing (IP65), SLI / SLS liquid flow meters are ideal for use in demanding industrial environments and laboratory settings. They hold two factory calibrations, one for water (H2O) and one for isopropyl alcohol (IPA), and provide more flexibility in terms of the measurable liquids. In combination with any of the SCC1 sensor cables, they provide RS485, 0-10 V analog, or USB output signals for reliable communication in harsh environments.
SLG liquid flow meters for ultra-low flow rates in the sub-nl/min range are the perfect solution for dynamic monitoring of ultra-low liquid flow rates in microfluidic systems or Ultra-High Pressure Liquid Chromatography (UHPLC). The fused silica flow channel withstands pressures of up to 1200 bar (17500 psi). Inert wetted materials (fused silica, stainless steel and PEEK) ensure high chemical resistance and excellent media compatibility.
Specifically designed for hydrocarbon-based fluids, such as photoresist, this high-purity flow meter is ideal for use in demanding coating systems, e.g. the semiconductor industry. Like all Sensirion liquid flow meters, it has no moving parts and no obstacles in the flow path. Due to the short response time, the SLQ-QT105 allows precise monitoring of highly dynamic processes for improved process reliability and reduced consumption of precious media.
With a calibrated flow rate range of up to 120 ml/min, dual calibration for water and IPA, and the exclusive use of high-purity wetted materials (only quartz glass and PFA), this sensor is ideal for dispensing applications in demanding environments, such as the semiconductor industry. Its excellent chemical compatibility makes the SLQ-QT500 the first choice for measurement of even aggressive chemicals and its larger inner diameter for the measurement of highly viscous liquids.
LPG10 Series - Planar Miniature Flow Sensors
Are you looking for a smart sensor solution for a very compact integration into an OEM device? The LPG10 series represents our smallest liquid flow sensor with a footprint of only 10x10 mm2. It offers an innovative design for flow rates below 1 ml/min down to the low microliter per minute range in a planar glass substrate with down-mount fluidic ports.
Liquid Flow Meter Kits
In order to conduct initial measurements quickly and easily, all our SLI, SLS, SLG, and SLQ liquid flow meters can be ordered as part of a Liquid Flow Meter Kit. In addition to the liquid flow meter of your choice, the kit contains USB and 0-10 V analog sensor cables for electrical connection, a Windows PC viewer and logging software, and a basic set of fluidic connectors for the selected sensor type.
Interested in purchasing one of Sensirion’s Liquid Flow Meter Kits? CONTACT US.