Mass Flow Controller SFC5400
Versatile Controller for Several Applications
The SFC5400 mass flow controller measures and controls mass flows with outstanding accuracy, long-term stability and repeatability and covers an impressively wide dynamic measurement range. The SFC5400 highly configurable and its body housing is made of metal. Furthermore, the flow controller is available with various interfaces and a variety of fluidic connections and measures maximum flow rates from 50 sccm up to 200 slm. The sensor signal is directly converted into a digital, completely calibrated and temperature-compensated signal on the chip. Multiple gas calibrations can be stored on a single device. Additionally, the flow controller can check whether the activated gas calibration matches the actual gas present. The versatility of the SFC5400 makes it the ideal solution for industrial and medical applications.
The SFC5400 mass flow controller is, as all sensor products, based on the innovative CMOSens® Technology, which integrates the high-precision sensor element and the analog and digital processing electronics on a single CMOS silicon chip and guarantees an outstanding performance. Combined with high-quality materials, the result is a durably stable, extremely fast and highly precise mass flow controller.
The SFC5400 mass flow controller is available as valve-free version too. The SFM5400 mass flow meter has the same performance characteristics as the mass flow controller and is used in similar applications, and the two products can be ideally combined. You can find further information and detailed specifications about the mass flow controller on the SFM5400 website.
For customer projects with high unit quantities, we adapt or develop your mass flow controller according to your specific requirements. Learn more about customized solutions.
- Ultra-fast gas flow control (settling time < 100 ms)
- High accuracy at lowest flow rates (< 1sccm)
- Excellent long-term stability and reliability
- No aging effects
- Wide dynamic range (turndown ratio 1000:1)
- Multigas feature
- High configuration
- Attractive price-performance-ratio thanks to CMOSens® Technology
- Digital and analog interfaces
- Flexible mechanical connection options: down mount, VCR and VCO, Swagelok, C-/W-Seal, etc.
- Customized versions available on request
For evaluation and qualification of the SFC5400 mass flow controllers, the evaluation kit EK-F5x is available.