Reliable processes and durability are essential in industrial automation. Sensirion’s proven sensor solutions help companies to optimize processes and make them as efficient as possible. As the leading expert in the field, Sensirion has unique expertise in sensor integration, even where conditions are particularly challenging. Thanks to this, Sensirion defines the market standard over and over again.
- Analytical Instruments:
Mass Spectrometry, Thermal Analysis, Gas/Liquid Chromatography
Thin Film & Crystalline Silicon PV, Physical & Chemical Vapor Deposition, Diffusion Furnace
- Leakage Testing
Our Expertise - Your Benefit
Wide Range of Applications
Our sensor systems are used in numerous industrial applications. Not only can you benefit from our experience in gas measurement and controlling in coating processes (PVD/CVD), in diffusion furnaces for the production of photovoltaic cells, in fuel cells, or in bioreactors, but also in gas and liquid flow measurement in analytical instruments, in process monitoring in the semiconductor industry, in laboratory equipment, and in process automation.
Besides standardized gas and liquid flow sensors, Sensirion also offers customized OEM solutions at very competitive rates. We adapt and develop individual mass flow meters and controllers as well as liquid flow sensors to meet your specific requirements and specifications. Thanks to our many years of experience, you can count on fast prototype development for OEM products and first-class customer support.
Sensirion has an international service and distribution network. Besides distribution, our services include calibration, recalibration, as well as the individual calibration of mass flow controllers for a wide variety of gases. Sensirion’s mass flow controllers can be purchased in small quantities – with customized advice and individual on-site support from partner companies, including training on request.
Ultrafast Settling Time
The flow control rate is an important performance factor in many industrial applications. Thanks to our unique CMOSens® technology, our sensor solutions ensure faster control rates than conventional approaches. For example, the settling time of a CMOSens® gas flow controller is less than 50 milliseconds. The response time of our liquid sensors is less than 30 milliseconds. This provides significant advantages in industrial applications.
Reliability & Performance
Our sensor solutions are characterized by extremely high accuracy and repeatability. Furthermore, our many years of experience in the automotive industry and related standards (ISO/TS 16949, AEC-Q100) ensure extremely high reliability, long-term stability, and robustness. The millions of sensors sold are proof of the success of our products.
Sensirion is a trusted supplier of:
Mass Flow Controller SFC5000
The digital mass flow controllers of the SFC5000 series ensure precise and long-term stable measurement and control over a wide dynamic measuring range. Furthermore, the SFC5000 offers a fast control rate as well as various mechanical connections and interfaces, and features a multigas option, high-calibrated flow rates, and a self-test function.
More about mass flow controller SFC5000
The SFC4000 mass flow controller offers high accuracy and fast response times over a wide dynamic flow range. It features an analog interface (0–5 V) as well as a fully calibrated and temperature-compensated sensor signal, and can be operated with a supply voltage of 14 to 24 VDC. The mass flow controller is suitable for a variety of process automation applications.
The SFM3000 mass flow meter measures the bidirectional flow of air and other non-aggressive gases with high accuracy and fast response times. It has a digital and temperature-compensated output signal and a very low pressure drop. The SFM3000 is ideal for high-volume and cost-sensitive applications.
The flow switch and bubble detector LG01 measures flow rates of just a few milliliters per minute and below. The non-invasive measurement principle makes it possible to measure the flow rate through the wall of a glass capillary. Thus, the LG01 is characterized by excellent biocompatibility and chemical resistance.
The small, pressure-resistant LG16 flow meter is used for measuring flow rates of less than 80 ml/min. Thanks to the short response time, the sensor makes it possible to detect air bubbles and monitor highly dynamic processes. A version specially designed for hydrocarbons is also available.
The compact LS32-1500 flow meter measures flow rates in the 0–40 ml/min. range. Due to the compact size of this flow meter, the sensor is extremely robust in terms of mechanics. The sensor is characterized by its excellent repeatability, chemical resistance, and fast response time. The LS32-1500 flow meter is ideal for use in biomedical applications and in fuel cells, as well as for dosage control and monitoring in industrial automation.
The SLI mass flow meter series for liquids has been developed for integration into demanding fluidic systems. The sensor series ensures highly accurate measurements at low flow rates, and makes reliable and accurate dosage possible of both aqueous substances as well as alcohol, oil, fuel, solvents, and adhesives.
The versatile SLQ-QT500 flow meter measures flow rates of 0–120 ml/min. for water-based as well as hydrocarbon-based liquids. The SLQ-QT500 is suitable for a variety of dosing and flow applications, and is ideal for integration into demanding coating systems in the semiconductor industry.
The SLQ-QT105 flow meter is perfectly tailored to integration in coating systems, and is ideally suited for measuring hydrocarbon-based liquids like photoresists and solvents. The SLQ-QT105 flow meter is characterized by high sensitivity, reliability, and speed.
The SLG flow meter series is ideal for monitoring rapidly changing ultralow flow rates in UHPLC applications. Due to the high pressure resistance of the flow channel and the sensor response time of just 40 milliseconds, it is particularly well suited to monitoring dynamic processes in chromatography.
The SLS-1500 flow meter offers a versatile sensor solution for industrial and laboratory applications. The SLS-1500 is ideal for process monitoring, and enables fast and precise measurements for flow rates of 0–40 ml/min. The inert, wetted materials of the sensor provide outstanding chemical resistance and biocompatibility.