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    Sensirion AG Switzerland
    • Home
    • Environmental Sensors
      • Humidity Sensors
        • Digital Humidity Sensor SHT4x (RH/T)
        • Digital Humidity Sensor SHT3x (RH/T)
        • Digital Humidity Sensor SHT85 (RH/T)
        • Digital Humidity Sensor SHTC3 (RH/T)
        • Digital Humidity Sensor SHTC1 (RH/T)
        • Digital Humidity and Temperature Module SCC30-DB (RH/T)
        • SF2 Filter Cap
        • SHT31 Smart Gadget Development Kit
        • Digital Humidity Sensor SHTW2 (RH/T) (NRND)
      • Temperature Sensors
        • Temperature Sensor STS3x
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        • VOC Sensor SGP40
        • VOC Sensor SGP30 / SGPC3 (NRND)
        • Multi-Gas, Humidity and Temperature Module SVM30 (NRND)
      • Particulate Matter Sensor SPS30
      • Carbon Dioxide Sensors
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      • CO2 Sensor STC31

        The most efficient way to measure high CO2 concentrations

        The STC31 is a chip-sized gas concentration sensor for high range, accurate CO2 measurements designed for high-volume production. The sensor is based on a revolutionized thermal conductivity measurement principle, which results in superior repeatability and long-term stability. This makes the STC31 the perfect choice for applications where reliability is key.

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    • Flow Sensors
      • Liquid Flow Meters
        • Lx – Compact Liquid Flow Meters
          • Liquid Flow Meter LG16
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        • SLx – Standalone Liquid Flow Meters
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          • Liquid Flow Meter SLQ-QT105
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      • Evaluation Kit SEK-Flow Sensing
      • Product Highlight

        Evaluation kit for the single-use liquid flow sensor LD20-2600B

        The LD20-2600B single-use liquid flow sensor for fast, precise and reliable measurements of the lowest flow rates in biomedical applications was successfully launched three years ago. The evaluation kit for this OEM liquid flow sensor can now also be purchased online via Sensirion's distribution network.

        Read more

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      • Our Markets

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        Experts for Smart Sensor Solutions

        Sensirion's sensors are used in a wide range of markets and different applications. Our high-quality environmental and flow sensors and sensor solutions improve energy efficiency and sustainability. They increase our safety, support our health and raise the quality of life. 

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        Sensirion Worldwide

        Founded in 1998 Sensirion has become the leading manufacturer of flow and environmental sensors solutions. The company now employs people in various countries such as the USA, South Korea, Japan, China, Taiwan, and Germany. The headquarters in Switzerland is responsible for research, development, and production. 

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        Learn more: www.sensirion.com/GPTW

         

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    • Home
    • Flow Sensors
    • Mass Flow Meters for Gases
    • Mass Flow Meters SFM3003 and SFM3013

    Mass Flow Meters SFM3003 and SFM3013

    Versatile digital flow sensor for high-volume applications

    The SFM3003 mass flow meter is Sensirion’s next-generation flow meter. Technically it is based on the SFM3019 meter that was brought onto the market during the Covid-19 pandemic to provide high volumes of flow meters for inspiratory flow measurements in medical ventilators. Compared to the SFM3019, the SFM3003 comes with a wider flow range as well as improved specifications.

    The flow of air, oxygen and mixtures thereof at rates between -30 and 300 slm is measured with excellent accuracy, reliability and long-term stability, and no recalibration is needed. The SFM3003 outputs an easily integrable digital I2C interface. The signal is internally linearized and temperature compensated. Furthermore, the SFM3003 flow meter has a very low pressure drop, ultra-fast response time and optimal signal-to-noise ratio.

    Several additional product versions exist for more options:

    • An extended flow range between -150 and 300 slm can be chosen with the SFM3003-300-CE
    • The SFM3013-300-CL offers an additional robustness to overpressure (up to 1 bar gauge pressure)
    • The SFM3013-300-CLM is also calibrated for heliox gas

     

    As part of the SFM3xxx platform, the SFM3003 is a versatile sensor solution for many different high-volume applications in which cost efficiency is the priority. The outstanding performance of the SFM3003 sensor is based on Sensirion’s patented CMOSens® Technology, which combines the sensor element, signal processing and digital calibration on a tiny microchip. The gas is measured by a thermal sensor element to provide an extended dynamic range and enhanced long-term stability compared to other flow-measuring technologies. Thanks to this proven CMOSens® Technology, the flow meter is perfectly suited for high-quality mass production and is the ideal choice for demanding and cost-sensitive OEM applications.

    Test and evaluate the SFM30x3 mass flow meters with the SEK evaluation kit.

    First samples of the new SFM30x3 mass flow meters will be available in Q1 2021. It will be available in Q2 2021 worldwide via distribution.


    Features

    • Flow range: up to 300 slm
    • Calibrated for O2, air and mixtures of air/O2 – version for heliox gas available
    • Digital I2C interface
    • Low pressure drop across the sensor
    • High accuracy, reliability and long-term stability
    • Ultra-fast response time
    • Best signal-to-noise ratio
    • Fully calibrated and temperature compensated; no recalibration neededIndustry-proven technology with a track record of more than 15 years

    Applications

    • Medical ventilation: inspiratory flow measurements
    • Anesthesia, inhalers and other medical instruments
    • Process automation
    • Burner control
    • Fuel cell control
    • Spectroscopy
    • Environment monitoring
    • Laboratory/analytical instruments

    Download Image

    Download Center

    Here you can find all documents of Sensirion's mass flow meters for download.


    Related Products

    Sensirion Mass Flow Meters SFM3000

    Mass Flow Meter SFM3000

    The digital SFM3000 mass flow meter excels in accuracy, fast response time and low pressure drop, making it highly suitable for cost-sensitive flow measurements in medical and industrial applications.

    Sensirion Mass Flow Meter SFM3119

    Mass Flow Meter SFM3119

    The SFM3119 is a compact digital flow meter. It is the successor of the SFM3100 mass flow meter. Compared to its predecessor, the SFM3119 comes with a digital I2C output as well as improved specifications.

    Mass Flow Meter Evaluation Kits

    For quick and easy measurements of all mass flow meters, an evaluation kit can be ordered. The kits provide a first impression of the performance of Sensirion's sensors.

    Technical Documents

    • Datasheet SFM3003
    • RoHS, REACH and Hal-Free Declaration GFM

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