Mass Flow Meter SFM5300
Flow Meter for Cost-Sensitive OEM Projects with High Unit Quantities
The SFM5300 mass flow meter enables the measurement of mass flows with outstanding accuracy (errors < 2%), long-term stability and repeatability. It boasts an impressive dynamic measurement range and a compact size. The SFM5300 mass flow meter is available with downmount connections and digital interfaces. The metal SFM5300 is the smaller variant of the SFM5400 mass flow meter and is exclusively for cost-sensitive OEM projects with high unit quantities.
The outstanding performance of the SFM5300 mass flow meter is based on the innovative CMOSens® Technology, which integrates the high-precision sensor technology and the processing electronics on a single CMOS silicon chip. Combined with high-quality materials, the result is the durably stable, extremely fast and highly precise SFM5300 mass flow meter.
The SFM5300 mass flow meter is the valve-free version of the SFC5300 mass flow controller. The two sensor products have the same performance characteristics and are used in similar applications, meaning they can be ideally combined. You can find further information and detailed specifications about the mass flow controller on the SFC5300 website.
Features
- High accuracy with low flow rates (< 1 sccm)
- Excellent accuracy / repeatability (2% / 0.2% of measured value respectively)
- Wide dynamic range (turndown ratio 1000:1)
- Compact size with downmount connection
- Multiple gases and gas recognition
- Digital interfaces
- Highly configurable
- MTBF 169 years - no recalibration required
Applications
- Analytical instruments (e.g. gas chromatography, mass spectrometry, thermal banalysis)
- Medical devices (e.g. ventilation, anesthesia)
- Industrial process automation (e.g. coating, thermal processing)
- Semiconductor industry (e.g. plasma etching processes, thin film deposition)
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