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    Sensirion AG Switzerland
    • Home
    • Environmental Sensors
      • Humidity Sensors
        • Digital Humidity Sensor SHTW2 (RH/T)
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      • CO2 and RH/T Sensor Module

        For HVAC and Air Quality Applications

        CMOSens® Technology for IR detection enables highly accurate carbon dioxide measurement at a competitive price. Along with NDIR measurement technology for CO2 detection, a best-in-class Sensirion humidity and temperature sensor is also integrated on the same sensor module. Ambient humidity and temperature can be outputted by Sensirion's algorithm expertise through modelling and compensation of external heat sources without the requirement of any additional components. 

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        • Lx – Compact Liquid Flow Meters
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      • Product Highlight

        Liquid Flow Sensor for Biomedical Applications

        The single-use liquid flow sensor LD20 enables fast, precise and reliable measurement of the lowest flow rates. The new flow sensor series is based on a successful design study that was first presented in 2014 and has already received several international awards. Product development of the LD20-2600B, the first representative of the new single-use sensor series, is now complete and it is ready for high-volume production. The intelligent, compact and cost-effective sensor is suitable for a wide range of biomedical applications in the field of critical and home care.

        Read more

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        Sensirion's sensors are used in a wide range of markets and different applications. Our high-quality environmental and flow sensors and sensor solutions improve energy efficiency and sustainability. They increase our safety, support our health and raise the quality of life. 

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    • Flow Sensors
    • Mass Flow Meters for Gases
    • Mass Flow Meter SFM5300

    Mass Flow Meter SFM5300

    Flow Meter for Cost-Sensitive OEM Projects with High Unit Quantities

    The SFM5300 mass flow meter enables the measurement of mass flows with outstanding accuracy (errors < 2%), long-term stability and repeatability. It boasts an impressive dynamic measurement range and a compact size. The SFM5300 mass flow meter is available with downmount connections and digital interfaces. The metal SFM5300 is the smaller variant of the SFM5400 mass flow meter and is exclusively for cost-sensitive OEM projects with high unit quantities.

    The outstanding performance of the SFM5300 mass flow meter is based on the innovative CMOSens® Technology, which integrates the high-precision sensor technology and the processing electronics on a single CMOS silicon chip. Combined with high-quality materials, the result is the durably stable, extremely fast and highly precise SFM5300 mass flow meter.

    The SFM5300 mass flow meter is the valve-free version of the SFC5300 mass flow controller. The two sensor products have the same performance characteristics and are used in similar applications, meaning they can be ideally combined. You can find further information and detailed specifications about the mass flow controller on the SFC5300 website.


    Features

    • High accuracy with low flow rates (< 1 sccm)
    • Excellent accuracy / repeatability (2% / 0.2% of measured value respectively)
    • Wide dynamic range (turndown ratio 1000:1)
    • Compact size with downmount connection
    • Multiple gases and gas recognition
    • Digital interfaces
    • Highly configurable
    • MTBF 169 years - no recalibration required

    Applications

    • Analytical instruments (e.g. gas chromatography, mass spectrometry, thermal banalysis)
    • Medical devices (e.g. ventilation, anesthesia)
    • Industrial process automation (e.g. coating, thermal processing)
    • Semiconductor industry (e.g. plasma etching processes, thin film deposition)

    Download Image

    Download Center

    Here you can find all documents of Sensirion's mass flow meters for download.


    Related Products

    Sensirion Mass Flow Controllers SFC5300

    Mass Flow Controller SFC5300

    The SFC5300 mass flow controller is the compact and reduced version of the SFC5400 mass flow controller. It is exclusively for cost-sensitive OEM projects with high unit quantities.

    Sensirion Mass Flow Meters SFM5400

    Mass Flow Meter SFM5400

    The SFM5400 mass flow meter is the valve-free version of the SFC5400 mass flow controller. It measures mass flows with outstanding accuracy and repeatability and has a wide dynamic measurement range.

    Sensirion Mass Flow Controllers SFC5400

    Mass Flow Controller SFC5400

    The SFC5400 mass flow controller enables extremely precise and repeatable control over a wide dynamic measuring range and is the ideal solution for various industrial and medical applications.

    Sensirion Customized Solutions

    Customized (OEM) Mass Flow Meters

    Besides the standard gas flow sensor solutions, we also offer customized OEM sensor solutions at an attractive price performance ratio. We adapt or develop your customized mass flow meters.

    Technical Documents

    • Datasheet SFM5300
    • RoHS, REACH and Hal-Free Declaration GFM

    Press

    • Versatile mass flow controller with ultra fast settling time

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