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Environmental Sensors
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- Long-Term Stable Particulate Matter Sensor
  For HVAC and Air Quality Applications
  
  The SPS30 particulate matter (PM) sensor represents a new technological breakthrough in optical PM sensors. Its measurement principle is based on laser scattering and makes use of Sensirion's innovative contamination-resistance technology. This technology, together with high-quality and long-lasting components, enables accurate measurements from the device's first operation and throughout its lifetime of more than eight years.
  
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Flow Sensors
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- Mass Flow Meters for Gases
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- Product Highlight
  New Liquid Flow Sensor for Life Science and Analytical Instruments
  
  Sensirion latest liquid flow sensor, the SLF3S-1300F, combines Sensirion’s excellent 20-year track record in low and lowest flow rate sensing with a radically optimized mechanical design and takes the well-established functionality to the next level in price-performance ratio. The sensor provides maximum safety, stability and long-term reliability for a wide range of applications, including the fields of diagnostics, analytical instruments and life sciences.
  
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  Sensirion's sensors are used in a wide range of markets and different applications. Our high-quality environmental and flow sensors and sensor solutions improve energy efficiency and sustainability. They increase our safety, support our health and raise the quality of life.
  
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  Founded in 1998 Sensirion has become the leading manufacturer of flow and environmental sensors solutions. The company now employs people in various countries such as the USA, South Korea, Japan, China, Taiwan, and Germany. The headquarters in Switzerland is responsible for research, development, and production.
  
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Developers

Customized (OEM) Mass Flow Meters

Customized Sensor Products According to Your Specific Requirements

Besides the standard gas flow sensor solutions, Sensirion also offers customized OEM sensor solutions at an attractive price performance ratio. We adapt or develop your customized mass flow meters according to your specific requirements.

Developing your product, we rely on our unique and patented CMOSens® Technology. This technology allows for integrating the highly precise sensor element as well as the electronics for signal processing on one single tiny chip. Correspondingly, gas flow sensor solutions based on CMOSens® set new standards for precision, reliability, functionality and cost effectiveness.

During the development process, you can rely on Sensirion's highly qualified project teams. Thanks to our committed and competent employees you always benefit from fast and effective technical Support.

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Here you can find all documents of Sensirion's mass flow meters for download.

Our Competence

Leading manufacturer of high-performance sensor solutions
Huge technical know-how (CMOSens® Technology)
Fast and effective customer support thanks to high-qualified R&D and project teams
Reliable processes (ISO/TS 16949, ISO 9001 and ISO 14001 certified QM-System)
Profound calibration knowledge
Experience in mass production (millions per year)

Your Sensor Solution

High-performance gas flow sensor solutions: long-term stable, precise, reliable, sensitive and fast
Individualized interface
Special measurement range
Individualized output characteristics
Adapted packaging
Accurate and dedicated calibration and temperature compensation

Related Products

Sensirion Mass Flow Meters SFM3000

Mass Flow Meter SFM3000

The digital SFM3000 mass flow meter excels in accuracy, fast response time and low pressure drop, making it highly suitable for cost-sensitive flow measurements in medical and industrial applications.

Sensirion Mass Flow Meters SFM3100

Mass Flow Meter SFM3100

The analog SFM3100 mass flow meter as a compact design and can be easily integrated into existing systems. An integrated temperature sensor eliminates the need to install an additional sensor.

Sensirion Mass Flow Meters SFM3200

Mass Flow Meter SFM3200

The fully calibrated SFM3200 is suitable for inspiratory flow measurement. In addition, an autoclavable / washable version (SFM3200-AW) for expiratory flow measurements is available.

Sensirion Mass Flow Meters SFM3300 3200 Kombi

Mass Flow Meter SFM3300

The SFM3300 proximal flow sensor features excellent measuring accuracy, robustness and a short signal processing time. The fully calibrated sensor measures bidirectional flow ranges of up to 250 slm.

Sensirion Mass Flow Meters SFM4100

Mass Flow Meter SFM4100

The SFM4100 flow meter provides excellent long-term stability and freedom from drift. It is the first choice for devices with a high usage rate and at the same time long service intervals.

Sensirion Mass Flow Meters SFM5400

Mass Flow Meter SFM5400

The SFM5400 mass flow meter is the valve-free version of the SFC5400 mass flow controller. It measures mass flows with outstanding accuracy and repeatability and has a wide dynamic measurement range.

Sensirion Mass Flow Meters SFM5300

Mass Flow Meter SFM5300

The SFM5300 mass flow meter is the compact and reduced version of the SFM5400 mass flow meter. It is exclusively for cost-sensitive OEM projects with high unit quantities.