Mass Flow Meters for Gases
With our long history of designing mass flow solutions for medical and industrial automation, Sensirion is your ideal partner to support you in the development of new products. Our mass flow meters ensure fast, accurate and economical measurements of gas flow over a wide dynamic range. They are extremly reliable and long-term stable and are free from zero-point drift.
At the heart of every mass flow sensor is a MEMS based calorimetric microsensor, which measures the gas flow using the thermal measurement principle. The sensor element is integrated with the complete signal conditioning electronics on one single chip. This unique integrated technological approach - provided by the unparalleled and innovative CMOSens® Technology - results in excellent performance at a very attractive cost.
Sensirion offers mass flow meters for diverse applications. Please find in the table below all our standard products. Furthermore, we also develop customized sensor solutions.
Please click on the mass flow meter inside the table for detailed information.
With the SFM3xxx flow platform, Sensirion offers its customers the right sensor for all flow measurements and underscores its worldwide expertise in the field of medical ventilation. The platform consists of multiple flow sensors with comprehensive capabilities for a diverse range of medical applications. All the sensors of the SFM3xxx platform share characteristics such as high precision and robustness. All are fully calibrated and temperature-compensated sensors and measure the flow rates of air and other non-corrosive gases bidirectionally and accurately. They also impress with very low pressure drop and fast signal processing times.
What We Offer
1. Expert first contact
- Specialized and experienced sales force
- Worldwide presence with a global distribution network
2. Fast and easy product evaluation
- Comprehensive product portfolio
- Easy-to-use evaluation kits for effortless measurement during sensor evaluation
- Technical documents - data sheets, sample code, application notes
3. Customized solutions
- Low pressure drop flow sensors
- Various flow rates and a variety of gases (multigas option)
- Disposable sensor solutions
- Low-cost flow sensor solutions
Read more about our customized sensor solutions.
4. Design-in support
- Assistance in the integration of Sensirion's sensors into your application
- Proven best practices to ensure that your production concept accommodates the requirements of SFMxx sensors

5. Lifetime support
- Reliable and flexible production
- Sustainable product innovation roadmap to meet your future needs
CMOSens® Technology
All our sensor products are based on the unique CMOSens® Technology which integrates the sensor component and the evaluation circuit on a single chip. This not only enables a precise and reliable measurement of mass flow but also ensures an outstanding long-term stability of our products.
Learn more about the innovative CMOSens® Technology and the advantages it brings regarding the measurement of mass flow.
Markets

Building Technology
Climate parameter measurements form the basis for a pleasant room climate with minimum energy consumption. Temperature, humidity, air flow and pressure differences are not the only relevant parameters.
More about the building technology sector

Industrial Automation
With our experience in industrial automation, we can support you with optimal solutions for your devices, machines and processes. Find more information about our expertise in the industrial sector and other aspects.

Medical
We know what it takes to be competitive in the medical sector, since only the best products survive in the long term. Sensirion stands for innovative products, customer-specific solutions and optimal Support.

Smart Energy
Our goal is to make the world smarter, more comfortable and environmentally sound through our products. For us, smart energy means sensor products that make it easier to monitor energy consumption in real time. With that knowledge, we can not only use resources more efficiently, but also improve the operating lives of the measuring devices.
More about smart energy