Mass Flow Meters for Gases
High precise, ultra fast und long-term stable measurement of gases.

Mass Flow Meters for Gases

With our long history of designing mass flow solutions for medical and industrial automation, Sensirion is your ideal partner to support you in the development of new products. Our mass flow meters ensure fast, accurate and economical measurements of gas flow over a wide dynamic range. They are extremly reliable and long-term stable and are free from zero-point drift.

At the heart of every mass flow sensor is a MEMS based calorimetric microsensor, which measures the gas flow using the thermal measurement principle. The sensor element is integrated with the complete signal conditioning electronics on one single chip. This unique integrated technological approach - provided by the unparalleled and innovative CMOSens® Technology - results in excellent performance at a very attractive cost.

Sensirion offers mass flow meters for diverse applications. Please find in the table below all our standard products. Furthermore, we also develop customized sensor solutions.

Please click on the mass flow meter inside the table for detailed information.

Get an Overview of Sensirion's Mass Flow Meters for Gases

	Applications	Flow Range	Pressure Drop	Interface	Calibrated Gases	Max. Working Pressure	Datasheets
SFM3000	Medical, Industrial Automation, Analytical Instruments	-200 to 200 slm	< 1 mbar @ 60 slm	Digital, I²C	Air, N_2,O₂	1.3 bar	SFM3000
SFM3100	Inspiratory Flow Measurement, Ventilation, Anesthesia	-24 to 240 slm	< 3 mbar @ 60 slm	Analog	Air, N₂, O₂	1.3 bar	SFM3100
SFM3200	Inspiratory Flow Measurement, Ventilation, Anesthesia, Drug Delivery	-100 to 250 slm	< 1 mbar @ 60 slm	Digital, I²C	Air, N_2,O₂	1.07 bar	SFM3200
SFM3200-AW (Autoclavable)	Expiratory Flow Measurement, Ventilation, Anesthesia, Metabolic Measurements	-100 to 250 slm	< 1 mbar @ 60 slm	Digital, I²C	Air, N_2,O₂	1.07 bar	SFM3200-AW
SFM3300-AW (Autoclavable)	Proximal Flow Measurement, Ventilation, Anesthesia, Metabolic Measurements	-250 to 250 slm	< 1.8 mbar @ 60 slm	Digital, I²C	Air, N_2,O₂	1.1 bar	SFM3300-AW
SFM3300-D	Proximal Flow Measurement, Ventilation, Anesthesia, Metabolic Measurements	-250 to 250 slm	< 1.8 mbar @ 60 slm	Digital, I²C	Air, N_2,O₂	1.1 bar	Coming soon
SFM3400-AW SFM3400-D	Neonatal Applications: Proximal Flow Measurement, Ventilation, Anesthesia, Metabolic Measurements	-33 to 33 slm	< 1.0 mbar @ 5 slm	Digital, I²C	Air, N_2,O₂	1.1 bar	Coming soon
SFM4100	Medical, Industrial Automation, Analytical Instruments	0 to 20 slm	< 25 mbar @ 20 slm	Digital, I²C	Air, N_2,O₂, N₂O, Ar, CO₂	6 bar	SFM4100
SFM5400	Analytical Instruments, Industrial Automation, Medical	50, 100, 200, 500 sccm; 1, 2, 5, 10, 20, 50, 100, 200 slm	< 0.1 bar	digital (RS485, IO-Link, DeviceNet) and analog (0 to 5 VDC, 0 to 10 VDC or 4 to 20 mA)	Air/N₂, H₂, O₂, He, Ar, CO₂, SF6, C4F8, and other gases on request	10 bar	SFM5400
SFM5300	Analytical Instruments, Industrial Automation, Medical	50, 100, 200, 500 sccm; 1, 2, 5, 10 slm	< 0.1 bar	digital (RS485 & IO-Link)	Air/N₂, H₂, O₂, He, Ar, CO₂, SF6, C4F8, and other gases on request	10 bar	SFM5300
SDP800 Series	Mass Air Flow Measurements in Bypass (for Medical, Burner Control and HVAC)	Depends on Bypass-Setup	Depends on Bypass-Setup	Digital, I²C	Air, N₂	2 bar	SDP800 Digital SDP800 Analog

Download table as PDF

What We Offer

1. Expert first contact

Specialized and experienced sales force
Worldwide presence with a global distribution network

2. Fast and easy product evaluation

Comprehensive product portfolio
Easy-to-use evaluation kits for effortless measurement during sensor evaluation
Technical documents - data sheets, sample code, application notes

3. Customized solutions

Low pressure drop flow sensors
Various flow rates and a variety of gases (multigas option)
Disposable sensor solutions
Low-cost flow sensor solutions

Read more about our customized sensor solutions.

4. Design-in support

Assistance in the integration of Sensirion's sensors into your application
Proven best practices to ensure that your production concept accommodates the requirements of SFMxx sensors

Sensirion Gas Flow What We Offer Illustration

5. Lifetime support

Reliable and flexible production
Sustainable product innovation roadmap to meet your future needs

Download Center

Here you can find all documents of Sensirion's mass flow meters for download.

CMOSens® Technology

All our sensor products are based on the unique CMOSens® Technology which integrates the sensor component and the evaluation circuit on a single chip. This not only enables a precise and reliable measurement of mass flow but also ensures an outstanding long-term stability of our products.

Learn more about the innovative CMOSens® Technology and the advantages it brings regarding the measurement of mass flow.

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