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    Sensirion AG Switzerland
    • Home
    • Environmental Sensors
      • Humidity Sensors
        • Digital Humidity Sensor SHT4x (RH/T)
        • Digital Humidity Sensor SHT3x (RH/T)
        • Digital Humidity Sensor SHT85 (RH/T)
        • Digital Humidity Sensor SHTC3 (RH/T)
        • Digital Humidity Sensor SHTC1 (RH/T)
        • Digital Humidity and Temperature Module SCC30-DB (RH/T)
        • SF2 Filter Cap
        • SHT31 Smart Gadget Development Kit
        • Digital Humidity Sensor SHTW2 (RH/T) (NRND)
      • Temperature Sensors
        • Temperature Sensor STS3x
        • Temperature Sensor STS32
      • Multi-Pixel Gas Sensors SGP
        • VOC Sensor SGP40
        • VOC Sensor SGP30 / SGPC3 (NRND)
        • Multi-Gas, Humidity and Temperature Module SVM30 (NRND)
      • Particulate Matter Sensor SPS30
      • Carbon Dioxide Sensors
        • Carbon Dioxide Sensor SCD4x
        • Carbon Dioxide Sensor SCD30
        • Carbon Dioxide Sensor STC31
      • Formaldehyde Sensor Module SFA30
      • Nubo Air
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      • CO2 Sensor STC31

        The most efficient way to measure high CO2 concentrations

        The STC31 is a chip-sized gas concentration sensor for high range, accurate CO2 measurements designed for high-volume production. The sensor is based on a revolutionized thermal conductivity measurement principle, which results in superior repeatability and long-term stability. This makes the STC31 the perfect choice for applications where reliability is key.

        More

    • Flow Sensors
      • Liquid Flow Meters
        • Lx – Compact Liquid Flow Meters
          • Liquid Flow Meter LG16
          • Liquid Flow Meter LG01
          • Liquid Flow Meter LS32-1500
        • SLx – Standalone Liquid Flow Meters
          • Liquid Flow Meter SLI
          • Liquid Flow Meter SLG
          • Liquid Flow Meter SLQ-QT105
          • Liquid Flow Meter SLQ-QT500
          • Liquid Flow Meter SLS-1500
        • Liquid Flow Sensor SLF3x
        • Liquid Flow Sensor LPG10
        • Liquid Flow Sensor LD20
        • Liquid Flow Meter Kits
        • Customized (OEM) Liquid Flow Meters
      • Mass Flow Meters for Gases
        • Mass Flow Meter SFM3000
        • Mass Flow Meters SFM3003 and SFM3013
        • Mass Flow Meter SFM3019
        • Mass Flow Meter SFM3100
        • Mass Flow Meter SFM3119
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        • Mass Flow Meter SFM5400
        • Mass Flow Meter Evaluation Kits
        • Customized (OEM) Mass Flow Meters
      • Mass Flow Controllers for Gases
        • Mass Flow Controller SFC5400
        • Mass Flow Controller SFC5300
        • Customized (OEM) Mass Flow Controllers
        • Evaluation Kit EK-F5x
      • Gas Sensors
      • Differential Pressure Sensors
        • Differential Pressure Sensor SDP3x
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      • Evaluation Kit SEK-Flow Sensing
      • Product Highlight

        Evaluation kit for the single-use liquid flow sensor LD20-2600B

        The LD20-2600B single-use liquid flow sensor for fast, precise and reliable measurements of the lowest flow rates in biomedical applications was successfully launched three years ago. The evaluation kit for this OEM liquid flow sensor can now also be purchased online via Sensirion's distribution network.

        Read more

    • Markets
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        • H2 Measurement
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      • Our Markets

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        Experts for Smart Sensor Solutions

        Sensirion's sensors are used in a wide range of markets and different applications. Our high-quality environmental and flow sensors and sensor solutions improve energy efficiency and sustainability. They increase our safety, support our health and raise the quality of life. 

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        Sensirion Worldmap

        Sensirion Worldwide

        Founded in 1998 Sensirion has become the leading manufacturer of flow and environmental sensors solutions. The company now employs people in various countries such as the USA, South Korea, Japan, China, Taiwan, and Germany. The headquarters in Switzerland is responsible for research, development, and production. 

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      • Most Popular Employer in Switzerland 2019

        Learn more: www.sensirion.com/GPTW

         

        Career Openings:

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    • Home
    • Flow Sensors
    • Mass Flow Controllers for Gases
    • Mass Flow Controller SFC3000 (Not Recommended for New Designs)

    Mass Flow Controller SFC3000 (Not Recommended for New Designs)

    Warning Image

    Not Recommended for New Designs (NRND)

    The SFC3000 mass flow controller is replaced by the SFC5300 mass flow controller.
    The SFC5300 is based on the new chip generation and has better performance as well as new functionality.
    The SFC3000 is only available to existing customers for support of their running production.

    The mass flow controller SFC3000 offers fast and accurate control of gas flows over a wide range. Its high accuracy and fast settling time is mainly based on the innovative CMOSens® Technology. Thereby the digitally calibrated and temperature compensated sensor signal is converted directly into a signal which is used in the digital controlling circuit to control the valve.

    The SFC3000 is a small, fully digital mass flow controller for high-volume OEM applications. Its excellent stability and repeatability make it ideal for analytical instruments. Different gas types and control ranges can be calibrated and switched by software.


    Features

    • Unbeaten price/performance ratio thanks to leading CMOSens® Technology
    • Multi gas / multi ranges options
    • Very high control speed (settling time <100ms)
    • Wide control range (1:1000)
    • Extremely stable flow control § Digital RS485 interface
    • Manufactured under ISO 9001 certified quality control system
    • Rugged chemically inert housing

    Applications

    • Analytical instruments (e.g. gas chromatography, mass spectrometry)
    • Medical devices (e.g. ventilation, anesthesia)
    • Industrial process automation (e.g. coating, thermal processing) 
    • Semiconductor industry (e.g. plasma etching processes, thin film deposition)

    Download Image

    Download Center

    Here you can find all documents of Sensirion's mass flow controllers for download.


    Related Products

    Sensirion Mass Flow Controllers SFC5300

    Mass Flow Controller SFC5300

    The SFC5300 mass flow controller is the compact and reduced version of the SFC5400 mass flow controller. It is exclusively for cost-sensitive OEM projects with high unit quantities.

    Technical Documents

    • Datasheet SFC3000
    • RoHS, REACH and Hal-Free Declaration Mass Flow Controllers

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