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  The SPS30 particulate matter (PM) sensor represents a new technological breakthrough in optical PM sensors. Its measurement principle is based on laser scattering and makes use of Sensirion's innovative contamination-resistance technology. This technology, together with high-quality and long-lasting components, enables accurate measurements from the device's first operation and throughout its lifetime of more than eight years.
  
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  Mass Flow Meter for Gas Mixing Applications
  
  The small sensor is calibrated for air, O₂ and N₂O gases and can also be used to monitor gas mixing. With a zero-point accuracy of 0.005 slm for a total range of up to 20 slm, the SFM4300 enables precise adjustment of the concentration in a wide selection of mixtures.
  
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Developers

Liquid Flow Meter SLQ-HC60

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End of Life (EOL)

The liquid flow meter SLQ-HC60 is no longer available. It has been replaced by the SLI-2000 in combination with the SCC1-Analog Sensor Cable. The SLI-2000 features an improved functionality und usability. All our standard products can be found in the overview.

Flow meters of the SLQ series operate with no moving parts and grant highest reliability and chemical compatibility. The media isolated MEMS-based sensor devices are especially designed for use in automated systems.

These small and highly sensitive flowmeters enable precise and fast measurements of dynamic flow rates. Also the detection of small bubbles is feasible. Flow rates below 100 ml/min can be measured for a wide range of media. A highly sensitive CMOSens® microchip detects the flow through the straight glass flow channel down to lowest flow rates.

The SLQ-HC60 is no longer available and has been replaced by the SLI-2000 liquid flow meter in combination with the SCC1-Analog Sensor Cable.

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Here you can find all documents of Sensirion's liquid flow meters for download.

Related Products

Sensirion Liquid Flow Meters SLI

Liquid Flow Meter SLI

The SLI mass flow meter series for liquids are for integration into demanding fluidic systems, ensures highly accurate measurements at low flow rates, and makes reliable and accurate dosage possible.

Sensirion Liquid Flow Meters LS32 1500

Liquid Flow Meter LS32-1500

The compact LS32-1500 flow meter measures flow rates in the 0–40 ml/min. range, is extremely robust in terms of mechanics and is characterized by its excellent repeatability and fast response time.

Sensirion Liquid Flow Meters SLQ QT500

Liquid Flow Meter SLQ-QT500

The versatile SLQ-QT500 flow meter measures flow rates of 0–120 ml/min. for water-based as well as hydrocarbon-based liquids and is suitable for a variety of dosing and flow applications.

Sensirion Liquid Flow Meters SLQ-QT105

Liquid Flow Meter SLQ-QT105

The SLQ-QT105 flow meter is characterized by high sensitivity, reliability, and speed, and is ideally suited for measuring hydrocarbon-based liquids like photoresists and solvents.

Sensirion Liquid Flow Meters SLG

Liquid Flow Meter SLG

The SLG flow meter series is ideal for monitoring rapidly changing ultralow flow rates in UHPLC applications and provides high pressure resistance of the flow channel and fast response time.

Sensirion Liquid Flow Meters LG16

Liquid Flow Meter LG16

The small, pressure-resistant LG16 flow meter is used for measuring flow rates of less than 80 ml/min. Thanks to the short response time, the sensor makes it possible to detect air bubbles.

Sensirion Liquid Flow Meters LG01

Liquid Flow Meter LG01

The flow switch and bubble detector LG01 measures flow rates of just a few milliliters per minute and below. It is characterized by excellent biocompatibility and chemical resistance.

Sensirion Liquid Flow Meters LPGx

Liquid Flow Sensor LPG10

The LPG10 OEM flow sensor on a surface of just 10 mm × 10 mm offers a smart, accurate and fast sensor solution for flow rates of only a few microliters per minute to up to 1 ml/min.

Liquid Flow Sensor LD20

The single-use LD20 flow sensors measure flow rates within a range of 0–1000 ml/h. The cost-effective sensors enable safe and reliable applications in the field of medical and biomedical technology.

Sensirion Liquid Flow Meters Flow Meter Kit SLI

Liquid Flow Meter Kits

For quickly and easily measurements of all SLI, SLS, SLG, or SLQ liquid flow meters, a test kit can be ordered. The liquid flow meter kit provides a first impression of the performance of the sensors.