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    • Home
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        • Digital Humidity Sensor SHTW2 (RH/T)
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      • Long-Term Stable Particulate Matter Sensor

        For HVAC and Air Quality Applications

        The SPS30 particulate matter (PM) sensor represents a new technological breakthrough in optical PM sensors. Its measurement principle is based on laser scattering and makes use of Sensirion's innovative contamination-resistance technology. This technology, together with high-quality and long-lasting components, enables accurate measurements from the device's first operation and throughout its lifetime of more than eight years.

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      • Product Highlight

        Easy Evaluation of the Mass Flow Meters SFM3xxx-AW and -D

        With the EK-F3x-CAP, expiratory and proximal sensors of the SFM3xxx platform can be tested quickly and easily. The evaluation kit works with both the disposable and reusable variants of the flow sensors. Visit Sensirion from February 5 to 7 at MD&M West fair, booth 1556, and learn more about the new evaluation kit.  

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    • Mass Flow Meter SFM5400

    Mass Flow Meter SFM5400

    Versatile Flow Meter for Several Applications

    The SFM5400 mass flow meter measures mass flows with outstanding accuracy (errors < 1%), long-term stability and repeatability and covers an impressively wide dynamic measurement range. The SFM5400 is made of metal and highly configurable. It is available with a variety of fluidic connections and various interfaces and measures maximum flow rates between 50 sccm and 200 slm. The sensor signal is directly converted into a digital, completely calibrated and temperature-compensated signal on the chip.  Multiple gas calibrations can be stored on a single device. Additionally, the flow meter can check whether the activated gas calibration matches the actual gas present. The SFM5400's versatility makes it the ideal solution for industrial and medical applications.

    The outstanding performance of the SFM5400 mass flow meter is based on the innovative CMOSens® Technology, which integrates the high-precision sensor element and the analog and digital processing electronics on a single CMOS silicon chip. Combined with high-quality materials, the result is a durably stable, extremely fast and highly precise mass flow meter.

    The SFM5400 mass flow meter is the valve-free version of the SFC5400 mass flow controller. The SFC5400 mass flow controller has the same performance characteristics as the mass flow meter and is used in similar applications, and the two products can be ideally combined. You can find further information and detailed specifications about the mass flow controller on the SFC5400 website.


    Features

    • High accuracy at low flow rates (< 1 sccm)
    • Excellent accuracy / repeatability (0.8% / 0.1% of measured value respectively)
    • Wide dynamic range (turndown ratio 1000:1)
    • Multiple gases and gas recognition
    • Digital and analog interfaces
    • Flexible mechanical connection options: down mount, VCR and VCO, Swagelok,
    • C-/W-Seal, etc.
    • Highly configurable
    • MTBF 169 years - no recalibration required

    Applications

    • Analytical instruments (e.g. gas chromatography, mass spectrometry, thermal analysis)
    • Medical devices (e.g. ventilation, anesthesia)
    • Industrial process automation (e.g. coating, thermal processing)
    • Semiconductor industry (e.g. plasma etching processes, thin film deposition)

    Download Image

    Download Center

    Here you can find all documents of Sensirion's mass flow meters for download.


    Related Products

    Sensirion Mass Flow Controllers SFC5400

    Mass Flow Controller SFC5400

    The SFC5400 mass flow controller enables extremely precise and repeatable control over a wide dynamic measuring range and is the ideal solution for various industrial and medical applications.

    Sensirion Mass Flow Meters SFM5300

    Mass Flow Meter SFM5300

    The SFM5300 mass flow meter is the compact and reduced version of the SFM5400 mass flow meter. It is exclusively for cost-sensitive OEM projects with high unit quantities.

    Sensirion Mass Flow Controllers SFC5300

    Mass Flow Controller SFC5300

    The SFC5300 mass flow controller is the compact and reduced version of the SFC5400 mass flow controller. It is exclusively for cost-sensitive OEM projects with high unit quantities.

    Sensirion Customized Solutions

    Customized (OEM) Mass Flow Meters

    Besides the standard gas flow sensor solutions, we also offer customized OEM sensor solutions at an attractive price performance ratio. We adapt or develop your customized mass flow meters.

    Technical Documents

    • Datasheet SFM5400
    • RoHS, REACH and Hal-Free Declaration GFM

    Press

    • Versatile mass flow controller with ultra fast settling time

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