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    • Home
    • Environmental Sensors
      • Humidity Sensors
        • Digital Humidity Sensor SHTW2 (RH/T)
        • Digital Humidity Sensor SHTC3 (RH/T)
        • Digital Humidity Sensor SHTC1 (RH/T)
        • Digital Humidity Sensor SHT3x (RH/T)
        • Digital Humidity Sensor SHT85 (RH/T)
        • Digital Humidity and Temperature Module SCC30-DB (RH/T)
        • SF2 Filter Cap
        • SHT31 Smart Gadget Development Kit
      • Temperature Sensors
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      • Long-Term Stable Particulate Matter Sensor

        For HVAC and Air Quality Applications

        The SPS30 particulate matter (PM) sensor represents a new technological breakthrough in optical PM sensors. Its measurement principle is based on laser scattering and makes use of Sensirion's innovative contamination-resistance technology. This technology, together with high-quality and long-lasting components, enables accurate measurements from the device's first operation and throughout its lifetime of more than eight years.

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      • Liquid Flow Meters
        • Lx – Compact Liquid Flow Meters
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          • Liquid Flow Meter SLS-1500
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        • Differential Pressure Sensor SDP3x
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      • Evaluation Kit SEK-Flow Sensing
      • Product Highlight

        Mass Flow Meter for Gas Mixing Applications

        The small sensor is calibrated for air, O2 and N2O gases and can also be used to monitor gas mixing. With a zero-point accuracy of 0.005 slm for a total range of up to 20 slm, the SFM4300 enables precise adjustment of the concentration in a wide selection of mixtures.

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        Experts for Smart Sensor Solutions

        Sensirion's sensors are used in a wide range of markets and different applications. Our high-quality environmental and flow sensors and sensor solutions improve energy efficiency and sustainability. They increase our safety, support our health and raise the quality of life. 

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        Sensirion Worldwide

        Founded in 1998 Sensirion has become the leading manufacturer of flow and environmental sensors solutions. The company now employs people in various countries such as the USA, South Korea, Japan, China, Taiwan, and Germany. The headquarters in Switzerland is responsible for research, development, and production. 

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    • Sensirion Technology

      CMOSens® Technology

      All Sensirion products are characterized by the fusion of the sensor element and the signal conditioning electronics on a single silicon CMOS chip.

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    • CMOSens® Technology

    Humidity Sensors with CMOSens®

    Capacitive Humidity Sensor Principle

    Sensirion Technology CMOSens

    In addition to the resistive method, the capacitive measurement principle, above all, established and proved itself as a standard in the past. For this principle, the sensor element is built out of a capacitor. The dielectric is a polymer which absorbs or releases water proportional to the relative environmental humidity, and thus changes the capacitance of the capacitor. This change in capacitance can be measured by an electronic circuit. This allows the relative air humidity to be determined.

    For humidity sensors with CMOSens® technology, a "micro-machined" finger electrode system with different protective and polymer cover layers forms the capacitance for the sensor chip, and, in addition to providing the sensor property, simultaneously protects the sensor from interference in ways previously not achieved.

    Humidity, Temperature and Dew Point

    The temperature sensor and the humidity sensor together form a single unit. This also enables an accurate and point-precise determination of the dew point, without incurring errors due to temperature gradients between the humidity and the temperature sensors. Through the unique linkage of these sensor elements with the signal amplifier unit, the analog-to-digital converter, the calibration data memory, as well as the digital, bus-ready interface, all on a surface area of a few square millimeters.

    Highest Stability and Performance

    Total coverage with condensation or even immersion in liquid present no problems whatsoever. Over two years of hardness tests have already shown this result. The signal amplification near the sensor allows the polymer layers to be optimized not for the signal strengths, but rather for long-term stability, which is significant for numerous applications. The analog-to-digital conversion, which is also performed "in place," makes the signal extremely insensitive to noise. A checksum generated by the chip itself is used for additional reliability. Last but not least, the calibration data loaded on the sensor chip guarantees that Sensirion humidity sensors have identical specifications and thus they can be replaced 100%. Other obvious advantages are the very short response times (4 sec at 1/e), high precision (±2% to ±5% according to configuration), as well as very low power consumption (< 3µA standby).

    Digital Interface

    Humidity and temperature sensors with CMOSens® technology can be connected directly to any microprocessor system by means of the digital 2-wire interface, which minimizes the system development times, saves costs, and leads to a significant advantage, especially for high-volume applications.

    Back to Overview CMOSens® Technology


    Other Measurement Principles

    CMOSens® Technology for Gas Flow

    The CMOSens® sensor provides error-free gas flow metering that remains stable over long periods of time and generates a very fast, high-precision sensor signal.

    Learn more

    CMOSens® in Gas Sensing

    Using Sensirion’s CMOSens® Technology, the SGP offers a complete sensor system on a single chip featuring a digital I2C interface, a temperature-controlled microhotplate, as well as preprocessed and calibrated indoor air quality signals.

    Learn more

    CMOSens® in Liquid Flow Measurement

    For more than 30 years, thermal mass flow measurements using coils around a steel capillary have been the standard in the precise measurement and dosing of mass flow rates.

    Learn more


    More Information about Humidity Sensors

    Sensirion Humidity Sensors SHT3x

    Humidity Sensors

    Digital humidity sensors for precise, reliable and cost-effective humidity measurement and control in a wide variety of OEM applications such as consumer goods, automotive and HVAC applications.

    More about humidity sensors

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