Mass Flow Meters for Gases
Sensirion's mass flow meters ensure fast, accurate and economical measurements of gas flow over a wide dynamic range. At the heart of every mass flow sensor is a MEMS based calorimetric microsensor, which measures the gas flow using the thermal measurement principle. The sensor element is integrated with the complete signal conditioning electronics on one single chip. This unique integrated technological approach - provided by the unparalleled and innovative CMOSens® Technology - results in excellent performance at a very attractive cost. That is why leading manufacturers, including ones in the medical industry, rely on Sensirion's highly sensitive flow meters today.
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The SFM300 features very low pressure drop, high speed and extremely high accuracy for measurements in a wide range up to 200 slm. In addition, the flow meter has an I²C interface and outputs a fully calibrated, temperature compensated signal. The SFM3000 is especially suitable for ventilation and anesthesia applications. More...
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Designed for anaesthesia devices, the fully calibrated SFM4100 features a digital I²C interface, excellent stability, and an impressively wide dynamic measuring range. Thanks to its 'Multigas' function, the sensor can be set up and calibrated for several different gases in parallel. More...
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At an unbeaten price/performance ratio the mass flow meter EM1 covers a very wide flow range (1:100) with an accuracy of 3% of measured value. The sensor enables fast (5 ms), accurate and reliable flow measurement for a wide range of standard and OEM applications. More...
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Based on our leading CMOSens® Technology, Sensirion develops customized sensor modules & complete devices for process control & mass flow controllers, metering, medical instruments, building control, HVAC and many other applications. More...
