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Mass flow meters and controllers from Sensirion use patented CMOSens® Technology; consisting of a calorimetric microsensor (MEMS) integrated with signal conditioning electronics on a single chip.
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Mass Flow Controller SFC3000
The SFC3000 is a small, fully digital mass flow controller for high-volume OEM applications. Its excellent stability and repeatability make it ideal for analytical instruments. Different gas types and control ranges can be calibrated and switched by software.
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Mass Flow Controller SFC4000
The SFC4000 is an extremely fast, precise and accurate analog mass flow controller. It offers an analog interface (0 – 5 V) in standard mechanical dimensions. Required power supply is unipolar 14 to 24 Vdc.
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Mass Flow Meter CMOSens® EM1
Cost optimized mass flow meters for gases. At an unbeatable price/performance ratio it covers a very wide flow range (1:100) with an accuracy of 3% of measured value. The CMOSens® EM1 enables fast (5 ms), accurate and reliable flow measurement at low cost for a wide range of standard and OEM applications.
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Mass flow sensor for air - ASF1400/ASF1430
Unique and wide dynamic range from 0.03 - 400 sccm gas flow, very high accuracy (1% m.v.), fully calibrated & temperature compensated, digital interface (RS232 or SPI), CE certified. |
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OEM solutions for gas flow measurement & control
Based on our leading CMOSens® Technology, Sensirion delevops sensor modules & complete devices for process control & mass flow controllers, metering, medical instruments, building control & HVAC and many other applications. |
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