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Sensirion manufactures several millions of CMOSens® components every year. We help to develop a superior product and will manufacture your calibrated, digital liquid flow sensor solution in large quantities. Our solutions are based on the leading CMOSens® Technology which offers a unique performance at low cost. The media isolated flow sensors using MEMS based thermal anemometry technology have been patented by Sensirion.
In partnership with our customers we design solutions for:
- Medical devices and health care applications
- Portable, battery driven devices
- Analytical instruments like HPLC & LC/MS
- Lab-on-chip & µTAS-systems
- Micro chemistry
- Disposable mass products
- Drug delivery solutions
- Liquid handling in bio-technology & diagnostics
- Semiconductor industry
- General process technology
- Laboratory automation
- Fuel Cell Systems
Our core competences include:
- Design and mass production of MEMS sensors
- Packaging & calibration
- Ultra high sensitivity (< 0.5 nano liter/min)
- Short response times (ms-range)
- Small size (down to chip size)
- Non-invasive (one wetted material only)
- High-end calibration
- Bio compatibility and high chemical resistance
Feasible specifications for customized flow sensor solutions:
Fluidic: Examples
- Liquids: H2O, EtOH, ACN...
- Dead volume free (straight capillary only)
- Absolute pressure: 0 ... 1000 bar
- Response time: ms-range
- Resolution: down to 0.1 nano liter/min.
- Liquid flow range: +/- nl ... ml/min. (bi-directional)
- Temperature range: -40 ...120 °C
Electrical
- Interface: RS-232, RS-485, analog, I2C, SPI
- Power supply: 2V ... 24V
- Fail safety: self test functionality, auto compensation
- Power consumption: < 100 micro Joule per measurement feasible!
Packaging
- Wetted materials upon your choice PEEK, stainless steel, fused silica
- Optionally protection category IP54, IP65, IP67
- Disposable components based on highly integrated sensor chips
Technical Data of Non-Customized OEM Sensors
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oem sensors
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